Servo Scanning Process of 3D Micro EDM

李勇,佟浩,郁鼎文,王扬
DOI: https://doi.org/10.3969/j.issn.1672-6030.2008.04.014
2008-01-01
Nanotechnology and Precision Engineering
Abstract:To improve the machining efficiency of three dimensional micro electrical discharge machine(EDM)and then promote it into industrial use,a servo scanning EDM method was proposed in which electrode wear is compensated on real time by servo control of discharge gap.The consistency of machining depth on each scanning layer and the influence of transverse scanning velocity on machining depth were studied and verified experimentally.Machining experimental resultsshow that 3D micro structures within the area of 1,mm2 can be shaped conveniently by use of the servo scanning EDM proc-ess.And the effective electrical discharge ratio and machining efficiency are greatly improved further when a vibration is assisted between electrode and workpiece.In the case of a typical 3D micro structure with 300,μm depth on copper plate,it can be machined within 50,min by using tungsten electrode of φ100,μm.
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