Abstract:Using the end discharge of micro-rod-shaped electrode to scan layer by layer, micro-electrical discharge machining (EDM) can fabricate complex 3D micro-structures. During the machining process, the discharge state is broken frequently due to the wear of the tool electrode and the relative scanning motion. To keep a favorable discharge gap, the feed spindle of the tool electrode needs the characteristics of high-frequency response and high resolution. In this study, an experimental system with a macro/micro-dual-feed spindle was designed to improve the machining performance of servo scanning 3D micro-EDM (3D SSMEDM), which integrates an ultrasonic linear motor as the macro-drive and a piezoelectric (PZT) actuator as micro-feeding mechanism. Based on LabVIEW and Visual C++ software platform, a real-time control system was developed to control coordinately the dual-feed spindle to drive the tool electrode. The micro-feed motor controls the tool electrode to keep the favorable discharge gap, and the macro-drive motor realizes long working range by a macro/micro-feed conversion. The emphasis is paid on the process control of the 3D SSMEDM based on macro/micro-dual-feed spindle for higher machining accuracy and efficiency. A number of experiments were carried out to study the machining performance. According to the numerical control (NC) code, several typical 3D micro-structures have been machined on the P-doped silicon chips. Our study results show that the machining process is stable and the regular discharge ratio is higher. Based on our fundamental machining experiments, some better-machined effects have been gained as follows. By machining a micro-rectangle cavity (960μm×660μm), the machined depth error can be controlled within 2%, the XY dimensional error is within 1%, the surface roughness Ra reaches 0.37μm, and the material removal rate is about 1.58×104μm3/s by using a tool electrode of Φ=100μm in diameter. By machining multi-micro-triangle cavities (side length 700μm), it is known that the machining repeatability error is <0.7%.

Servo Control Optimization of Micro Discharge Gap and Its Reasonable Matching with Scanning Speed in Servo Scanning 3D Micro EDM Based on Threshold Control Method

Servo Scanning EDM for 3D Micro Structures

Experimental Research on Servo Scanning Machining Technique of Micro EDM

Servo Scanning Process of 3D Micro EDM

Servo scanning 3D micro-EDM based on macro/micro-dual-feed spindle

A Study of Influence of Servo-Control Strategy on Machining Efficiency in Micro-EDM

Vibration-Assisted Servo Scanning 3d Micro Edm

Sliding-mode Controller and Algorithm for Improving Servo Control of Discharge Gap in Precise Fast Hole EDM

Experimental Research on Servo Control Characteristics of Electrical Discharge in Micro Gap

Experimental Research on Effects of Process Parameters on Servo Scanning 3D Micro Electrical Discharge Machining

On-Machine Process of Rough-And-Finishing Servo Scanning Edm for 3d Micro Cavities

Research on the Efficient Self-Adaptive Servo-Control Strategy in Micro-Edm Milling

Optimisation of the Micro and Small Hole EDM Process Based on the Experimental Design

Self-adaptive fuzzy controller with formulary rule for servo control of discharge gap in Micro EDM

Layer depth constrained servo scanning EDM for 3D microstructures

Algorithms and machining experiments to reduce depth errors in servo scanning 3D micro EDM

Servo scanning 3D micro EDM for array micro cavities using on-machine fabricated tool electrodes

An investigation on discharge servo parameters and machining servo mode optimization of MS-WEDM

Array Servo Scanning Micro EDM of 3D Micro Cavities

CAD/CAM Integration System of 3D Micro EDM

Determination of the Optimal Servo Feed Speed by Thermal Model During Multi-Pulse Discharge Process of WEDM