Abstract:The monitoring of micro machining gap and the control of machining status within the gap have become bottlenecks in the research and development of micro electrochemical machining (ECM). General electrical signals are difficult to reflect the status of micro machining gap. Electrolytic products in micro machining gap are prone to precipitation and retention, leading to unstable material removal process. Micro ECM urgently requires gap status monitoring and feedback control. To realize gap status monitoring, a sensors-integrated silicon electrode, with a micro temperature sensor and a micro conductivity sensor on the silicon electrode near-front sidewall, is proposed innovatively in this study. Based on bulk silicon process and electroplating process, sensors-integrated silicon electrodes are designed and fabricated. Based on the signal processing system built for the temperature and conductivity sensor, the temperature and conductivity detection functions are verified and the sensors are calibrated. Micro ECM experiments with sensors-integrated silicon electrodes are carried out and micro holes with 200 μm depth are machined. For the conductivity sensor on the sensors-integrated silicon electrode, due to the affection of electrolytic environment, the function surface is contaminated and damaged, and the structural design needs to be further improved. For the temperature sensor, it is not affected by the electrolytic environment due to insulation-film's protection, and reliable temperature monitoring is achieved in micro ECM. The detection results indicate that the temperature inside the machining gap has increased by 20 °C due to the electrochemical thermal effect and resistance thermal effect in micro ECM, and the temperature shows an increasing trend while machining depth increasing. The feasibility of process monitoring with sensors-integrated silicon electrode in micro ECM is preliminarily verified.

Gap status identification and control of wire electrochemical micromachining

A study on wire electrochemical micromachining for fabrication of microgrooves

Localized electrochemical micromachining with gap control

Study on the Preparation Process for High Accuracy Micro Machining by Wire Electrical Discharge Machining

Thermo-mechanical analysis and optimal tension control of micro wire electrode

Wire Electrochemical Machining with Pulsating Radial Electrolyte Supply and Preparation of Its Tube Electrode with Micro-Holes

Analysis and Reduction of Process Energy Consumption and Thermal Deformation in a Micro-Structure Wire Electrode Electric Discharge Machining Thin-Wall Component

Design and Fabrication of a Sensors-integrated Silicon Electrode for Gap Status Monitoring in Micro Electrochemical Machining

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A Macroscopic Mechanical Model of Wire Electrode Deflection Considering Temperature Increment in MS-WEDM Process

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Sustainable Production of High-Uniformity Workpiece Surface Quality in Wire Electrical Discharge Machining by Fabricating Surface Microstructure on Wire Electrode

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Method for controlling the area of the electrolyte outlets in the flow field simulation and experimental verification of electrochemical machining

Investigation on a Novel Surface Microstructure Wire Electrode for Improving Machining Efficiency and Surface Quality in WEDM

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Analysis and control of electrical discharge machining (EDM) process

Study on surface evenness of super-high-thickness cutting in high-speed wire electrical discharge machining