Forward Gated-Diode R-G Current Method: A Simple Novel Technique for Characterizing Lateral Lightly Doping Region of LDD MOSFET’s

He Jin,Huang Aihua,Zhang Xing,Huang Ru,Wang Yangyuan

DOI: https://doi.org/10.1007/s11767-001-0027-2

2001-01-01

Abstract:This paper presents a simple novel technique-forward gated-diode R-G current method—to determine the lateral lightly-doped source/drain (S/D) region interface state density and effective surface doping concentration of the lightly-doped drain (LDD) N− MOSFET’s simultaneously. One interesting result of the numerical analysis is the direct characterization of the interface state density and characteristic gate voltage values corresponding to LDD effective surface doping concentration. It is observed that the S/D N− surface doping concentration and corresponding region’s interface state density are R-G current peak position and amplitude dependent, respectively. It is convincible that the proposed method is well suitable for the characterization of deep sub-micron MOSFET’s in the current ULSI technology.