FinFET Reliability Analysis by Forward Gated-Diode Method

Ming Fang,Jin He,Wen Wu,Wei Zhao,Ruonan Wang,Ping He,Lei Song
DOI: https://doi.org/10.2991/icemie-16.2016.2
2016-01-01
Abstract:The reliability issue of the FinFET is studied in details in this paper by the forward gated-diode R-G current method. Extraction of the stress induced interface states and oxide traps of FinFET is performed from a series of the R-G current measurement and developed physics expression. As the result, the interface states can be extracted by the relationship between the net increase value of the maximum substrate current(Delta Ipeak) and stress time; and the oxide trap can be reflected by the drift of gate voltage (Delta Vg) corresponding to Delta Ipeak.
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