The structure of chemical vapor deposited silicon carbide

J. Chin,P.K. Gantzel,R.G. Hudson
DOI: https://doi.org/10.1016/0040-6090(77)90103-1
IF: 2.1
1977-01-01
Thin Solid Films
Abstract:The morphologies of SiC deposited by the thermal decomposition of CH3SiCl3 are presented. These are non-fluid bed deposits prepared in an induction-heated reactor. The morphologies of the deposits were found to vary systematically with the substrate temperature, chamber pressure and gas composition. Deposits at a low temperature, a moderate chamber pressure and with low H2:CH3SiCl3 ratio are generally fine grained. Macrograins composed of finer micrograins are typical in intermediate temperature deposits. The surface contours of the macrograins are smoothly rounded. As temperatures or pressures are increased, the edges of grains become sharper, the surfaces become flatter and faceting becomes common. At very high temperatures and high H2: CH3SiCl3 ratios, large single crystals are observed. Fracture surfaces containing faceted crystals no longer show the preponderance of transgranular fracture noted in deposits at lower temperature and lower H2:CH3SiCl3 ratio. X-ray diffraction showed that these deposits are cubic β-SiC and disordered hexagonal 2H-SiC. The plane of preferred orientation was (111) for the low temperature and (220) for the higher temperature deposits. Microprobe analysis showed that carbon-rich, stoichiometric or silicon-rich SiC was deposited depending on the temperature, pressure and gas composition.
materials science, multidisciplinary,physics, applied, condensed matter, coatings & films
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