High-Performance Self-Aligned Top-Gate Amorphous InGaZnO TFTs With 4 nm-Thick Atomic-Layer-Deposited AlO x Insulator

Jiye Li,Yuqing Zhang,Jialiang Wang,Huan Yang,Xiaoliang Zhou,Mansun Chan,Xinwei Wang,Lei Lu,Shengdong Zhang

DOI: https://doi.org/10.1109/led.2022.3160514

IF: 4.8157

2022-05-01

IEEE Electron Device Letters

Abstract:Electrical characteristics of self-aligned top-gate (SATG) amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) with 4 nm-thick atomic-layer-deposited (ALD) AlO_x gate insulator (GI) are investigated. It is demonstrated that the SATG a-IGZO TFTs present high-performance metrics including a near-ideal subthreshold swing (SS) of 60.9 mV/dec, a low off-state current below 10⁻¹² A, a positive <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="6.022ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2592.7 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="361" y="0"></use></g></g></g></svg></span> of 0.1 V, and a decent mobility of 14.1 cm²/ <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.104ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 4780.7 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-74" x="0" y="0"></use> <use xlink:href="#MJMATHI-65" x="361" y="0"></use> <use xlink:href="#MJMATHI-78" x="828" y="0"></use> <use xlink:href="#MJMATHI-74" x="1400" y="0"></use> <use xlink:href="#MJMATHI-56" x="1762" y="0"></use> <use xlink:href="#MJMAIN-2C" x="2531" y="0"></use> <use xlink:href="#MJMATHI-63" x="2976" y="0"></use> <use xlink:href="#MJMATHI-64" x="3410" y="0"></use> <use xlink:href="#MJMATHI-6F" x="3933" y="0"></use> <use xlink:href="#MJMATHI-74" x="4419" y="0"></use></g></svg></span> s. In addition, the TFTs exhibit negligible <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="6.022ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2592.7 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="361" y="0"></use></g></g></g></svg></span> shifts less than 0.02 V against electrical bias stresses. 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engineering, electrical & electronic