A High RF-Performance AlGaN/GaN HEMT With Ultrathin Barrier and Stressor In Situ SiN

Sheng Wu,Minhan Mi,Meng Zhang,Ling Yang,Bin Hou,Xiaohua Ma,Yue Hao

DOI: https://doi.org/10.1109/ted.2021.3111140

IF: 3.1

2021-11-01

IEEE Transactions on Electron Devices

Abstract:The submicrometer gate HEMT is fabricated with an ultrathin-barrier (UTB) AlGaN/gallium nitride (GaN) combined with in situ SiN passivation. The sheet resistance of the UTB Al_0.2Ga_0.8N (4 nm)/GaN heterostructure is effectively reduced by the SiN_x passivation layer grown by metal organic chemical vapor deposition (MOCVD), from 6500 to <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.311ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 4870 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-33"></use> <use xlink:href="#MJMAIN-31" x="500" y="0"></use> <use xlink:href="#MJMAIN-32" x="1001" y="0"></use> <use xlink:href="#MJMATHI-4F" x="1751" y="0"></use> <use xlink:href="#MJMATHI-6D" x="2515" y="0"></use> <use xlink:href="#MJMATHI-65" x="3393" y="0"></use> <use xlink:href="#MJMATHI-67" x="3860" y="0"></use> <use xlink:href="#MJMATHI-61" x="4340" y="0"></use></g></svg></span> /⬜. With the 20-nm stress-engineered in situ SiN, the device not only provides a large output current of 1.05 A/mm but also demonstrates promising potential on the RF applications, which gives AlGaN material two records high cutoff frequency <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="14.103ex" height="2.843ex" style="vertical-align: -0.838ex;" viewBox="0 -863.1 6071.9 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-66" x="0" y="0"></use><g transform="translate(490,-242)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-54" x="1762" y="0"></use></g> <use xlink:href="#MJMAIN-2F" x="2334" y="0"></use><g transform="translate(2835,0)"> <use xlink:href="#MJMATHI-66" x="0" y="0"></use><g transform="translate(490,-242)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-61" x="878" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="1408" y="0"></use></g></g></g></g></svg></span> of 157 GHz/334 GHz for 100-nm gated device and 211 GHz/379 GHz for 70-nm gated device. During the continuous wave (CW) power measurement at 30 GHz, the 70-nm devices exhibit a large output power of 4.6 W/mm associated with a peak power-added efficiency (PAE) of 48.1% and a gain of 11.6 dB ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.535ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 4966.6 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-64" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-73" x="523" y="0"></use></g></g> <use xlink:href="#MJMAIN-3D" x="2909" y="0"></use><g transform="translate(3965,0)"> <use xlink:href="#MJMAIN-32"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use></g></g></svg></span> V), and a high PAE of 53.8% with an output power density of 1.9 W/mm and a gain of 10.8 dB ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.535ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 4966.6 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-64" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-73" x="523" y="0"></use></g></g> <use xlink:href="#MJMAIN-3D" x="2909" y="0"></use><g transform="translate(3965,0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use></g></g></svg></span> V), respectively. The huge potential of the UTB-AlGaN/GaN is demonstrated for high-frequency and large-output power applications when it is combined with the in situ SiN, which is necessary for future communication systems.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMAIN-33" d="M127 463Q100 463 85 480T69 524Q69 579 117 622T233 665Q268 665 277 664Q351 652 390 611T430 522Q430 470 396 421T302 350L299 348Q299 347 308 345T337 336T375 315Q457 262 457 175Q457 96 395 37T238 -22Q158 -22 100 21T42 130Q42 158 60 175T105 193Q133 193 151 175T169 130Q169 119 166 110T159 94T148 82T136 74T126 70T118 67L114 66Q165 21 238 21Q293 21 321 74Q338 107 338 175V195Q338 290 274 322Q259 328 213 329L171 330L168 332Q166 335 166 348Q166 366 174 366Q202 366 232 371Q266 376 294 413T322 525V533Q322 590 287 612Q265 626 240 626Q208 626 181 615T143 592T132 580H135Q138 579 143 578T153 573T165 566T175 555T183 540T186 520Q186 498 172 481T127 463Z"></path><path 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