−400 mA mm −1 Drain Current Density Normally-Off Polycrystalline Diamond MOSFETs

Xiaohua Zhu,Siwu Shao,Yuhao Chang,Runming Zhang,Sylvia Yuk Yee Chung,Yu Fu,Te Bi,Yabo Huang,Kang An,Jinlong Liu,Chengming Li,Hiroshi Kawarada

DOI: https://doi.org/10.1109/led.2022.3160354

IF: 4.8157

2022-05-01

IEEE Electron Device Letters

Abstract:This letter reports a high drain current density and normally-off operation metal-oxide-semiconductor field-effect transistors (MOSFETs) with a gate insulator of 100 nm-Al₂O₃. A heavily boron-doped layer as the source/drain region was deposited on a (110) polycrystalline diamond substrate to achieve a low ohmic contact resistance. The MOSFETs demonstrate a maximum current density of −400 mA mm <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="2.333ex" height="2.343ex" style="vertical-align: -0.171ex;" viewBox="0 -934.9 1004.4 1008.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"><g transform="translate(0,362)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-2212" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-31" x="778" y="0"></use></g></g></svg></span> normalized by gate width and a maximum current density of <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="18.029ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 7762.3 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-2212" x="0" y="0"></use><g transform="translate(778,0)"> <use xlink:href="#MJMAIN-32"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use> <use xlink:href="#MJMAIN-30" x="1001" y="0"></use> <use xlink:href="#MJMAIN-30" x="1501" y="0"></use></g> <use xlink:href="#MJMAIN-2C" x="2780" y="0"></use> <use xlink:href="#MJMAIN-2C" x="3225" y="0"></use> <use xlink:href="#MJMATHI-6D" x="3670" y="0"></use> <use xlink:href="#MJMATHI-75" x="4549" y="0"></use> <use xlink:href="#MJMATHI-74" x="5121" y="0"></use> <use xlink:href="#MJMATHI-65" x="5483" y="0"></use> <use xlink:href="#MJMATHI-78" x="5949" y="0"></use> <use xlink:href="#MJMATHI-74" x="6522" y="0"></use> <use xlink:href="#MJMATHI-6D" x="6883" y="0"></use></g></svg></span> mA mm⁻¹ normalized by gate length and gate width, which are the highest values for normally-off diamond FETs. The Grain boundaries (GBs) and the nitrogen impurities ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="19.289ex" height="3.009ex" style="vertical-align: -0.671ex;" viewBox="0 -1006.6 8305 1295.7" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-73" x="0" y="0"></use> <use xlink:href="#MJMATHI-69" x="469" y="0"></use> <use xlink:href="#MJMATHI-6D" x="815" y="0"></use> <use xlink:href="#MJMAIN-33" x="1693" y="0"></use> <use xlink:href="#MJMAIN-2C" x="2194" y="0"></use> <use xlink:href="#MJMAIN-2C" x="2639" y="0"></use> <use xlink:href="#MJMATHI-74" x="3084" y="0"></use> <use xlink:href="#MJMATHI-69" x="3445" y="0"></use> <use xlink:href="#MJMATHI-6D" x="3791" y="0"></use> <use xlink:href="#MJMATHI-65" x="4669" y="0"></use> <use xlink:href="#MJMATHI-73" x="5136" y="0"></use> <use xlink:href="#MJMAIN-2C" x="5605" y="0"></use> <use xlink:href="#MJMAIN-2C" x="6051" y="0"></use><g transform="translate(6496,0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use><g transform="translate(1001,393)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-31"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-37" x="500" y="0"></use></g></g></g></svg></span> cm <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="2.333ex" height="2.343ex" style="vertical-align: -0.171ex;" viewBox="0 -934.9 1004.4 1008.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"><g transform="translate(0,362)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-2212" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-33" x="778" y="0"></use></g></g></svg></span> ) as ionized donors in the channel region caused the threshold voltage ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="6.022ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2592.7 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="361" y="0"></use></g></g></g></svg></span> ) to shift in the negative direction, exhibiting normally-off characteristics. 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