The Device and Circuit Level Benchmark of Si-Based Cold Source FETs for Future Logic Technology
Guodong Qi,Weizhuo Gan,Lijun Xu,Jiangtao Liu,Qihang Yang,Xiaona Zhu,Jiuren Zhou,Xinyu Ma,Guangxi Hu,Tao Chen,Shaofeng Yu,Zhenhua Wu,Huaxiang Yin,Ye Lu
DOI: https://doi.org/10.1109/ted.2022.3164372
IF: 3.1
2022-01-01
IEEE Transactions on Electron Devices
Abstract:Si-based cold source field-effect transistor (CSFET) combines the benefits of sub-60-mV/dec steep-slope switching, high <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="21.869ex" height="2.843ex" style="vertical-align: -1.005ex;" viewBox="0 -791.3 9415.8 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-49" x="0" y="0"></use><g transform="translate(440,-155)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-61" x="878" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1408" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="1769" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-72" x="2346" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="2797" y="0"></use><g transform="translate(2599,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-73" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-63" x="469" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-72" x="903" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-69" x="1354" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="1700" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="2203" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-73" x="2565" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-63" x="3034" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-72" x="3468" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-69" x="3919" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="4265" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="4768" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-73" x="5130" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="5599" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-79" x="5961" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6C" x="6458" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="6757" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-4F" x="7223" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-4E" x="7987" y="0"></use></g></g></g></svg></span> current, and compatibility with current Si CMOS process technology. Therefore, it is a promising candidate for future energy-efficient logic technology. For the first time, we present device and circuit benchmark of Si-based gate-all-around (GAA) CSFET versus conventional GAA MOSFET. The device's characteristics are first generated using a calibrated multiscale TCAD framework. Then a novel SPICE device compact model based on neural network is created to capture the unique CSFET <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.799ex" height="2.343ex" style="vertical-align: -0.505ex;" viewBox="0 -791.3 2496.9 1008.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-49" x="0" y="0"></use> <use xlink:href="#MJMAIN-2212" x="726" y="0"></use> <use xlink:href="#MJMATHI-56" x="1727" y="0"></use></g></svg></span> and <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="6.394ex" height="2.343ex" style="vertical-align: -0.505ex;" viewBox="0 -791.3 2752.9 1008.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-43" x="0" y="0"></use> <use xlink:href="#MJMAIN-2212" x="982" y="0"></use> <use xlink:href="#MJMATHI-56" x="1983" y="0"></use></g></svg></span> data with high precision. This SPICE model further enables the circuit benchmark simulations. Through this approach, it is identified that compared with GAA MOSFET, Si-based GAA CSFET shows up to 67% performance/power gain for a supply voltage ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="6.201ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2669.8 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-64" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-64" x="523" y="0"></use></g></g></g></svg></span> ) below 0.43 V in an ideal gate-loaded ring oscillator circuit. It is 70% more energy-efficient in the capacitive-loaded fan-out of 4 (FO4) inverter circuit. Finally, the comparisons of GAA CSFETs with different nanosheet widths are accomplished for design technology cooptimization (DTCO) purpose.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMATHI-49" d="M43 1Q26 1 26 10Q26 12 29 24Q34 43 39 45Q42 46 54 46H60Q120 46 136 53Q137 53 138 54Q143 56 149 77T198 273Q210 318 216 344Q286 624 286 626Q284 630 284 631Q274 637 213 637H193Q184 643 189 662Q193 677 195 680T209 683H213Q285 681 359 681Q481 681 487 683H497Q504 676 504 672T501 655T494 639Q491 637 471 637Q440 637 407 634Q393 631 388 623Q381 609 337 432Q326 385 315 341Q245 65 245 59Q245 52 255 50T307 46H339Q345 38 345 37T342 19Q338 6 332 0H316Q279 2 179 2Q143 2 113 2T65 2T43 1Z"></path><path stroke-width="1" id="MJMATHI-6D" d="M21 287Q22 293 24 303T36 341T56 388T88 425T132 442T175 435T205 417T221 395T229 376L231 369Q231 367 232 367L243 378Q303 442 384 442Q401 442 415 440T441 433T460 423T475 411T485 398T493 385T497 373T500 364T502 357L510 367Q573 442 659 442Q713 442 746 415T780 336Q780 285 742 178T704 50Q705 36 709 31T724 26Q752 26 776 56T815 138Q818 149 821 151T837 153Q857 153 857 145Q857 144 853 130Q845 101 831 73T785 17T716 -10Q669 -10 648 17T627 73Q627 92 663 193T700 345Q700 404 656 404H651Q565 404 506 303L499 291L466 157Q433 26 428 16Q415 -11 385 -11Q372 -11 364 -4T353 8T350 18Q350 29 384 161L420 307Q423 322 423 345Q423 404 379 404H374Q288 404 229 303L222 291L189 157Q156 26 151 16Q138 -11 108 -11Q95 -11 87 -5T76 7T74 17Q74 30 112 181Q151 335 151 342Q154 357 154 369Q154 405 129 405Q107 405 92 377T69 316T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-61" d="M33 157Q33 258 109 349T280 441Q331 441 370 392Q386 422 416 422Q429 422 439 414T449 394Q449 381 412 234T374 68Q374 43 381 35T402 26Q411 27 422 35Q443 55 463 131Q469 151 473 152Q475 153 483 153H487Q506 153 506 144Q506 138 501 117T481 63T449 13Q436 0 417 -8Q409 -10 393 -10Q359 -10 336 5T306 36L300 51Q299 52 296 50Q294 48 292 46Q233 -10 172 -10Q117 -10 75 30T33 157ZM351 328Q351 334 346 350T323 385T277 405Q242 405 210 374T160 293Q131 214 119 129Q119 126 119 118T118 106Q118 61 136 44T179 26Q217 26 254 59T298 110Q300 114 325 217T351 328Z"></path><path stroke-width="1" id="MJMATHI-74" d="M26 385Q19 392 19 395Q19 399 22 411T27 425Q29 430 36 430T87 431H140L159 511Q162 522 166 540T173 566T179 586T187 603T197 615T211 624T229 626Q247 625 254 615T261 596Q261 589 252 549T232 470L222 433Q222 431 272 431H323Q330 424 330 420Q330 398 317 385H210L174 240Q135 80 135 68Q135 26 162 26Q197 26 230 60T283 144Q285 150 288 151T303 153H307Q322 153 322 145Q322 142 319 133Q314 117 301 95T267 48T216 6T155 -11Q125 -11 98 4T59 56Q57 64 57 83V101L92 241Q127 382 128 383Q128 385 77 385H26Z"></path><path stroke-width="1" id="MJMATHI-68" d="M137 683Q138 683 209 688T282 694Q294 694 294 685Q294 674 258 534Q220 386 220 383Q220 381 227 388Q288 442 357 442Q411 442 444 415T478 336Q478 285 440 178T402 50Q403 36 407 31T422 26Q450 26 474 56T513 138Q516 149 519 151T535 153Q555 153 555 145Q555 144 551 130Q535 71 500 33Q466 -10 419 -10H414Q367 -10 346 17T325 74Q325 90 361 192T398 345Q398 404 354 404H349Q266 404 205 306L198 293L164 158Q132 28 127 16Q114 -11 83 -11Q69 -11 59 -2T48 16Q48 30 121 320L195 616Q195 629 188 632T149 637H128Q122 643 122 645T124 664Q129 683 137 683Z"></path><path stroke-width="1" id="MJMATHI-72" d="M21 287Q22 290 23 295T28 317T38 348T53 381T73 411T99 433T132 442Q161 442 183 430T214 408T225 388Q227 382 228 382T236 389Q284 441 347 441H350Q398 441 422 400Q430 381 430 363Q430 333 417 315T391 292T366 288Q346 288 334 299T322 328Q322 376 378 392Q356 405 342 405Q286 405 239 331Q229 315 224 298T190 165Q156 25 151 16Q138 -11 108 -11Q95 -11 87 -5T76 7T74 17Q74 30 114 189T154 366Q154 405 128 405Q107 405 92 377T68 316T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-73" d="M131 289Q131 321 147 354T203 415T300 442Q362 442 390 415T419 355Q419 323 402 308T364 292Q351 292 340 300T328 326Q328 342 337 354T354 372T367 378Q368 378 368 379Q368 382 361 388T336 399T297 405Q249 405 227 379T204 326Q204 301 223 291T278 274T330 259Q396 230 396 163Q396 135 385 107T352 51T289 7T195 -10Q118 -10 86 19T53 87Q53 126 74 143T118 160Q133 160 146 151T160 120Q160 94 142 76T111 58Q109 57 108 57T107 55Q108 52 115 47T146 34T201 27Q237 27 263 38T301 66T318 97T323 122Q323 150 302 164T254 181T195 196T148 231Q131 256 131 289Z"></path><path stroke-width="1" id="MJMATHI-63" d="M34 159Q34 268 120 355T306 442Q362 442 394 418T427 355Q427 326 408 306T360 285Q341 285 330 295T319 325T330 359T352 380T366 386H367Q367 388 361 392T340 400T306 404Q276 404 249 390Q228 381 206 359Q162 315 142 235T121 119Q121 73 147 50Q169 26 205 26H209Q321 26 394 111Q403 121 406 121Q410 121 419 112T429 98T420 83T391 55T346 25T282 0T202 -11Q127 -11 81 37T34 159Z"></path><path stroke-width="1" id="MJMATHI-69" d="M184 600Q184 624 203 642T247 661Q265 661 277 649T290 619Q290 596 270 577T226 557Q211 557 198 567T184 600ZM21 287Q21 295 30 318T54 369T98 420T158 442Q197 442 223 419T250 357Q250 340 236 301T196 196T154 83Q149 61 149 51Q149 26 166 26Q175 26 185 29T208 43T235 78T260 137Q263 149 265 151T282 153Q302 153 302 143Q302 135 293 112T268 61T223 11T161 -11Q129 -11 102 10T74 74Q74 91 79 106T122 220Q160 321 166 341T173 380Q173 404 156 404H154Q124 404 99 371T61 287Q60 286 59 284T58 281T56 279T53 278T49 278T41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-70" d="M23 287Q24 290 25 295T30 317T40 348T55 381T75 411T101 433T134 442Q209 442 230 378L240 387Q302 442 358 442Q423 442 460 395T497 281Q497 173 421 82T249 -10Q227 -10 210 -4Q199 1 187 11T168 28L161 36Q160 35 139 -51T118 -138Q118 -144 126 -145T163 -148H188Q194 -155 194 -157T191 -175Q188 -187 185 -190T172 -194Q170 -194 161 -194T127 -193T65 -192Q-5 -192 -24 -194H-32Q-39 -187 -39 -183Q-37 -156 -26 -148H-6Q28 -147 33 -136Q36 -130 94 103T155 350Q156 355 156 364Q156 405 131 405Q109 405 94 377T71 316T59 280Q57 278 43 278H29Q23 284 23 287ZM178 102Q200 26 252 26Q282 26 310 49T356 107Q374 141 392 215T411 325V331Q411 405 350 405Q339 405 328 402T306 393T286 380T269 365T254 350T243 336T235 326L232 322Q232 321 229 308T218 264T204 212Q178 106 178 102Z"></path><path stroke-width="1" id="MJMATHI-79" d="M21 287Q21 301 36 335T84 406T158 442Q199 442 224 419T250 355Q248 336 247 334Q247 331 231 288T198 191T182 105Q182 62 196 45T238 27Q261 27 281 38T312 61T339 94Q339 95 344 114T358 173T377 247Q415 397 419 404Q432 431 462 431Q475 431 483 424T494 412T496 403Q496 390 447 193T391 -23Q363 -106 294 -155T156 -205Q111 -205 77 -183T43 -117Q43 -95 50 -80T69 -58T89 -48T106 -45Q150 -45 150 -87Q150 -107 138 -122T115 -142T102 -147L99 -148Q101 -153 118 -160T152 -167H160Q177 -167 186 -165Q219 -156 247 -127T290 -65T313 -9T321 21L315 17Q309 13 296 6T270 -6Q250 -11 231 -11Q185 -11 150 11T104 82Q103 89 103 113Q103 170 138 262T173 379Q173 380 173 381Q173 390 173 393T169 400T158 404H154Q131 404 112 385T82 344T65 302T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-6C" d="M117 59Q117 26 142 26Q179 26 205 131Q211 151 215 152Q217 153 225 153H229Q238 153 241 153T246 151T248 144Q247 138 245 128T234 90T214 43T183 6T137 -11Q101 -11 70 11T38 85Q38 97 39 102L104 360Q167 615 167 623Q167 626 166 628T162 632T157 634T149 635T141 636T132 637T122 637Q112 637 109 637T101 638T95 641T94 647Q94 649 96 661Q101 680 107 682T179 688Q194 689 213 690T243 693T254 694Q266 694 266 686Q266 675 193 386T118 83Q118 81 118 75T117 65V59Z"></path><path stroke-width="1" id="MJMATHI-65" d="M39 168Q39 225 58 272T107 350T174 402T244 433T307 442H310Q355 442 388 420T421 355Q421 265 310 237Q261 224 176 223Q139 223 138 221Q138 219 132 186T125 128Q125 81 146 54T209 26T302 45T394 111Q403 121 406 121Q410 121 419 112T429 98T420 82T390 55T344 24T281 -1T205 -11Q126 -11 83 42T39 168ZM373 353Q367 405 305 405Q272 405 244 391T199 357T170 316T154 280T149 261Q149 260 169 260Q282 260 327 284T373 353Z"></path><path stroke-width="1" id="MJMATHI-4F" d="M740 435Q740 320 676 213T511 42T304 -22Q207 -22 138 35T51 201Q50 209 50 244Q50 346 98 438T227 601Q351 704 476 704Q514 704 524 703Q621 689 680 617T740 435ZM637 476Q637 565 591 615T476 665Q396 665 322 605Q242 542 200 428T157 216Q157 126 200 73T314 19Q404 19 485 98T608 313Q637 408 637 476Z"></path><path stroke-width="1" id="MJMATHI-4E" d="M234 637Q231 637 226 637Q201 637 196 638T191 649Q191 676 202 682Q204 683 299 683Q376 683 387 683T401 677Q612 181 616 168L670 381Q723 592 723 606Q723 633 659 637Q635 637 635 648Q635 650 637 660Q641 676 643 679T653 683Q656 683 684 682T767 680Q817 680 843 681T873 682Q888 682 888 672Q888 650 880 642Q878 637 858 637Q787 633 769 597L620 7Q618 0 599 0Q585 0 582 2Q579 5 453 305L326 604L261 344Q196 88 196 79Q201 46 268 46H278Q284 41 284 38T282 19Q278 6 272 0H259Q228 2 151 2Q123 2 100 2T63 2T46 1Q31 1 31 10Q31 14 34 26T39 40Q41 46 62 46Q130 49 150 85Q154 91 221 362L289 634Q287 635 234 637Z"></path><path stroke-width="1" id="MJMAIN-2212" d="M84 237T84 250T98 270H679Q694 262 694 250T679 230H98Q84 237 84 250Z"></path><path stroke-width="1" id="MJMATHI-56" d="M52 648Q52 670 65 683H76Q118 680 181 680Q299 680 320 683H330Q336 677 336 674T334 656Q329 641 325 637H304Q282 635 274 635Q245 630 242 620Q242 618 271 369T301 118L374 235Q447 352 520 471T595 594Q599 601 599 609Q599 633 555 637Q537 637 537 648Q537 649 539 661Q542 675 545 679T558 683Q560 683 570 683T604 682T668 681Q737 681 755 683H762Q769 676 769 672Q769 655 760 640Q757 637 743 637Q730 636 719 635T698 630T682 623T670 615T660 608T652 599T645 592L452 282Q272 -9 266 -16Q263 -18 259 -21L241 -22H234Q216 -22 216 -15Q213 -9 177 305Q139 623 138 626Q133 637 76 637H59Q52 642 52 648Z"></path><path stroke-width="1" id="MJMATHI-43" d="M50 252Q50 367 117 473T286 641T490 704Q580 704 633 653Q642 643 648 636T656 626L657 623Q660 623 684 649Q691 655 699 663T715 679T725 690L740 705H746Q760 705 760 698Q760 694 728 561Q692 422 692 421Q690 416 687 415T669 413H653Q647 419 647 422Q647 423 648 429T650 449T651 481Q651 552 619 605T510 659Q484 659 454 652T382 628T299 572T226 479Q194 422 175 346T156 222Q156 108 232 58Q280 24 350 24Q441 24 512 92T606 240Q610 253 612 255T628 257Q648 257 648 248Q648 243 647 239Q618 132 523 55T319 -22Q206 -22 128 53T50 252Z"></path><path stroke-width="1" id="MJMATHI-78" d="M52 289Q59 331 106 386T222 442Q257 442 286 424T329 379Q371 442 430 442Q467 442 494 420T522 361Q522 332 508 314T481 292T458 288Q439 288 427 299T415 328Q415 374 465 391Q454 404 425 404Q412 404 406 402Q368 386 350 336Q290 115 290 78Q290 50 306 38T341 26Q378 26 414 59T463 140Q466 150 469 151T485 153H489Q504 153 504 145Q504 144 502 134Q486 77 440 33T333 -11Q263 -11 227 52Q186 -10 133 -10H127Q78 -10 57 16T35 71Q35 103 54 123T99 143Q142 143 142 101Q142 81 130 66T107 46T94 41L91 40Q91 39 97 36T113 29T132 26Q168 26 194 71Q203 87 217 139T245 247T261 313Q266 340 266 352Q266 380 251 392T217 404Q177 404 142 372T93 290Q91 281 88 280T72 278H58Q52 284 52 289Z"></path><path stroke-width="1" id="MJMATHI-64" d="M366 683Q367 683 438 688T511 694Q523 694 523 686Q523 679 450 384T375 83T374 68Q374 26 402 26Q411 27 422 35Q443 55 463 131Q469 151 473 152Q475 153 483 153H487H491Q506 153 506 145Q506 140 503 129Q490 79 473 48T445 8T417 -8Q409 -10 393 -10Q359 -10 336 5T306 36L300 51Q299 52 296 50Q294 48 292 46Q233 -10 172 -10Q117 -10 75 30T33 157Q33 205 53 255T101 341Q148 398 195 420T280 442Q336 442 364 400Q369 394 369 396Q370 400 396 505T424 616Q424 629 417 632T378 637H357Q351 643 351 645T353 664Q358 683 366 683ZM352 326Q329 405 277 405Q242 405 210 374T160 293Q131 214 119 129Q119 126 119 118T118 106Q118 61 136 44T179 26Q233 26 290 98L298 109L352 326Z"></path></defs></svg>
engineering, electrical & electronic,physics, applied