650 V Super-Junction Insulated Gate Bipolar Transistor Based on 45 μm Ultrathin Wafer Technology

Yuzhou Wu,Zehong Li,Jia Pan,Chong Chen,Jiuying Yu,Min Ren,Bo Zhang

DOI: https://doi.org/10.1109/led.2022.3154782

IF: 4.8157

2022-04-01

IEEE Electron Device Letters

Abstract:In this letter, 650 V generation I (thin) and generation II (ultrathin) super-junction insulated gate bipolar transistors (SJ-IGBT) based on deep trench etching and refilling processes are manufactured. It is worth mentioning that generation II is fabricated using 45 <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="9.503ex" height="2.009ex" style="vertical-align: -0.338ex;" viewBox="0 -719.6 4091.5 865.1" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use> <use xlink:href="#MJMATHI-74" x="1451" y="0"></use> <use xlink:href="#MJMATHI-65" x="1812" y="0"></use> <use xlink:href="#MJMATHI-78" x="2279" y="0"></use> <use xlink:href="#MJMATHI-74" x="2851" y="0"></use> <use xlink:href="#MJMATHI-6D" x="3213" y="0"></use></g></svg></span> ultrathin wafer technology. Due to extra parasitic BJTs, both the thin and ultrathin SJ-IGBT have a larger base amplification factor, that the current density capability exceeds 650 A/cm². Compared with thin SJ-IGBT both at 650 A/cm² and at room temperature, the on- state voltage of the ultrathin SJ-IGBT could be decreased by about 160 mV, turn-off energy loss could be decreased by 22%. Furthermore, the ultrathin SJ-IGBT maintains a robust short circuit capability of no less than <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.458ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 4933.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use><g transform="translate(1251,0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use></g> <use xlink:href="#MJMATHI-74" x="2702" y="0"></use> <use xlink:href="#MJMATHI-65" x="3063" y="0"></use> <use xlink:href="#MJMATHI-78" x="3530" y="0"></use> <use xlink:href="#MJMATHI-74" x="4102" y="0"></use> <use xlink:href="#MJMATHI-73" x="4464" y="0"></use></g></svg></span> under 400 V DC bus voltage.<svg xmlns="http://www.w3.org/2000/svg" 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engineering, electrical & electronic