Contact Resistance Reduction of Low Temperature Atomic Layer Deposition ZnO Thin Film Transistor Using Ar Plasma Surface Treatment

Jiqing Lu,Wenhui Wang,Jinxuan Liang,Jun Lan,Longyang Lin,Feichi Zhou,Kai Chen,Guobiao Zhang,Mei Shen,Yida Li

DOI: https://doi.org/10.1109/led.2022.3169345

IF: 4.8157

2022-01-01

IEEE Electron Device Letters

Abstract:In this work, the effect of Ar plasma at the S/D contact in a low temperature (200°) fabricated ALD ZnO thin-film transistors (TFTs) for contact resistance reduction is systematically studied. With an optimized Ar plasma process time, the contact resistance is significantly reduced by &gt;50% from 170 to <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="22.602ex" height="2.843ex" style="vertical-align: -0.838ex;" viewBox="0 -863.1 9731.5 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-38"></use> <use xlink:href="#MJMAIN-34" x="500" y="0"></use><g transform="translate(1001,0)"> <use xlink:href="#MJMATHI-73" x="0" y="0"></use> <use xlink:href="#MJMATHI-66" x="469" y="0"></use> <use xlink:href="#MJMATHI-4F" x="1020" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1783" y="0"></use> <use xlink:href="#MJMATHI-65" x="2662" y="0"></use> <use xlink:href="#MJMATHI-67" x="3128" y="0"></use> <use xlink:href="#MJMATHI-61" x="3609" y="0"></use></g> <use xlink:href="#MJMAIN-2F" x="5139" y="0"></use> <use xlink:href="#MJMATHI-6D" x="5640" y="0"></use> <use xlink:href="#MJMATHI-75" x="6518" y="0"></use> <use xlink:href="#MJMATHI-74" x="7091" y="0"></use> <use xlink:href="#MJMATHI-65" x="7452" y="0"></use> <use xlink:href="#MJMATHI-78" x="7919" y="0"></use> <use xlink:href="#MJMATHI-74" x="8491" y="0"></use> <use xlink:href="#MJMATHI-6D" x="8853" y="0"></use></g></svg></span> . This reduction is attributed to the oxygen vacancies modulating the effective contact barrier height, as elucidated by detailed AFM and XPS analysis. Consequently, the effective field-effect mobility ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="10.144ex" height="2.009ex" style="vertical-align: -0.671ex;" viewBox="0 -576.1 4367.4 865.1" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use><g transform="translate(878,0)"> <use xlink:href="#MJMATHI-75" x="0" y="0"></use><g transform="translate(572,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-69" x="1762" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="2107" y="0"></use><g transform="translate(1745,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-46" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-45" x="749" y="0"></use></g></g></g></g></svg></span> ) of the TFT is increased by 50% to 39.2 cm²/Vs. The <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="10.144ex" height="2.009ex" style="vertical-align: -0.671ex;" viewBox="0 -576.1 4367.4 865.1" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use><g transform="translate(878,0)"> <use xlink:href="#MJMATHI-75" x="0" y="0"></use><g transform="translate(572,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-69" x="1762" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="2107" y="0"></use><g transform="translate(1745,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-46" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-45" x="749" y="0"></use></g></g></g></g></svg></span> of the developed TFT is one of the highest reported thus far using ALD process at the lowest temperature. The advances achieved in this work provide valuable insight into the defect's regulation mechanism of ZnO-metal contact and its effect on the TFTs performance. 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