Enhanced Negative Bias Illumination Stability of ZnO Thin Film Transistors by Using a Two-Step Oxidation Method

Xue Chen,Jiaxian Wan,Juan Gao,Hao Wu,Chang Liu

DOI: https://doi.org/10.1109/ted.2022.3159284

IF: 3.1

2022-05-01

IEEE Transactions on Electron Devices

Abstract:In this study, we illustrate a novel way to improve the stability under negative bias illumination stress (NBIS) of ZnO thin-film transistors (TFTs) by adding O₃ treatment after each cycle of growth at 100°C by atomic layer deposition. Compared with the TFTs without O₃ treatment, the shift of threshold voltage ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="8.898ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 3831.3 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-44" x="0" y="0"></use> <use xlink:href="#MJMATHI-65" x="828" y="0"></use> <use xlink:href="#MJMATHI-6C" x="1295" y="0"></use> <use xlink:href="#MJMATHI-74" x="1593" y="0"></use> <use xlink:href="#MJMATHI-61" x="1955" y="0"></use><g transform="translate(2484,0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="361" y="0"></use></g></g></g></svg></span> ) is reduced from −4.39 to −0.98 V under NBIS, while the mobility decreased from 31.2 to 18.4 cm² V⁻¹s⁻¹. (H₂O and O₃ as oxidants)/ZnO (H₂O as oxidant) bilayer structure, a high filed-effectmobility of 32.1 cm²V⁻¹s⁻¹ and an excellent stability ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="23.976ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 10323.1 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-44" x="0" y="0"></use> <use xlink:href="#MJMATHI-65" x="828" y="0"></use> <use xlink:href="#MJMATHI-6C" x="1295" y="0"></use> <use xlink:href="#MJMATHI-74" x="1593" y="0"></use> <use xlink:href="#MJMATHI-61" x="1955" y="0"></use><g transform="translate(2484,0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-61" x="878" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1408" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="1769" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-72" x="2346" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="2797" y="0"></use><g transform="translate(2599,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="361" y="0"></use></g></g></g> <use xlink:href="#MJMAIN-3D" x="6708" y="0"></use> <use xlink:href="#MJMAIN-2212" x="7764" y="0"></use><g transform="translate(8543,0)"> <use xlink:href="#MJMAIN-32"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-33" x="779" y="0"></use> <use xlink:href="#MJMAIN-34" x="1279" y="0"></use></g></g></svg></span> V) have been obtained simultaneously. These improved performance and stabilities are attributed to the bilayer channel structures and the reduction of <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="2.385ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 1026.8 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6F" x="825" y="-213"></use></g></svg></span> in the ZnO channel layer treated by O₃.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMATHI-74" d="M26 385Q19 392 19 395Q19 399 22 411T27 425Q29 430 36 430T87 431H140L159 511Q162 522 166 540T173 566T179 586T187 603T197 615T211 624T229 626Q247 625 254 615T261 596Q261 589 252 549T232 470L222 433Q222 431 272 431H323Q330 424 330 420Q330 398 317 385H210L174 240Q135 80 135 68Q135 26 162 26Q197 26 230 60T283 144Q285 150 288 151T303 153H307Q322 153 322 145Q322 142 319 133Q314 117 301 95T267 48T216 6T155 -11Q125 -11 98 4T59 56Q57 64 57 83V101L92 241Q127 382 128 383Q128 385 77 385H26Z"></path><path stroke-width="1" id="MJMATHI-65" d="M39 168Q39 225 58 272T107 350T174 402T244 433T307 442H310Q355 442 388 420T421 355Q421 265 310 237Q261 224 176 223Q139 223 138 221Q138 219 132 186T125 128Q125 81 146 54T209 26T302 45T394 111Q403 121 406 121Q410 121 419 112T429 98T420 82T390 55T344 24T281 -1T205 -11Q126 -11 83 42T39 168ZM373 353Q367 405 305 405Q272 405 244 391T199 357T170 316T154 280T149 261Q149 260 169 260Q282 260 327 284T373 353Z"></path><path stroke-width="1" id="MJMATHI-78" d="M52 289Q59 331 106 386T222 442Q257 442 286 424T329 379Q371 442 430 442Q467 442 494 420T522 361Q522 332 508 314T481 292T458 288Q439 288 427 299T415 328Q415 374 465 391Q454 404 425 404Q412 404 406 402Q368 386 350 336Q290 115 290 78Q290 50 306 38T341 26Q378 26 414 59T463 140Q466 150 469 151T485 153H489Q504 153 504 145Q504 144 502 134Q486 77 440 33T333 -11Q263 -11 227 52Q186 -10 133 -10H127Q78 -10 57 16T35 71Q35 103 54 123T99 143Q142 143 142 101Q142 81 130 66T107 46T94 41L91 40Q91 39 97 36T113 29T132 26Q168 26 194 71Q203 87 217 139T245 247T261 313Q266 340 266 352Q266 380 251 392T217 404Q177 404 142 372T93 290Q91 281 88 280T72 278H58Q52 284 52 289Z"></path><path stroke-width="1" id="MJMATHI-69" d="M184 600Q184 624 203 642T247 661Q265 661 277 649T290 619Q290 596 270 577T226 557Q211 557 198 567T184 600ZM21 287Q21 295 30 318T54 369T98 420T158 442Q197 442 223 419T250 357Q250 340 236 301T196 196T154 83Q149 61 149 51Q149 26 166 26Q175 26 185 29T208 43T235 78T260 137Q263 149 265 151T282 153Q302 153 302 143Q302 135 293 112T268 61T223 11T161 -11Q129 -11 102 10T74 74Q74 91 79 106T122 220Q160 321 166 341T173 380Q173 404 156 404H154Q124 404 99 371T61 287Q60 286 59 284T58 281T56 279T53 278T49 278T41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-52" d="M230 637Q203 637 198 638T193 649Q193 676 204 682Q206 683 378 683Q550 682 564 680Q620 672 658 652T712 606T733 563T739 529Q739 484 710 445T643 385T576 351T538 338L545 333Q612 295 612 223Q612 212 607 162T602 80V71Q602 53 603 43T614 25T640 16Q668 16 686 38T712 85Q717 99 720 102T735 105Q755 105 755 93Q755 75 731 36Q693 -21 641 -21H632Q571 -21 531 4T487 82Q487 109 502 166T517 239Q517 290 474 313Q459 320 449 321T378 323H309L277 193Q244 61 244 59Q244 55 245 54T252 50T269 48T302 46H333Q339 38 339 37T336 19Q332 6 326 0H311Q275 2 180 2Q146 2 117 2T71 2T50 1Q33 1 33 10Q33 12 36 24Q41 43 46 45Q50 46 61 46H67Q94 46 127 49Q141 52 146 61Q149 65 218 339T287 628Q287 635 230 637ZM630 554Q630 586 609 608T523 636Q521 636 500 636T462 637H440Q393 637 386 627Q385 624 352 494T319 361Q319 360 388 360Q466 361 492 367Q556 377 592 426Q608 449 619 486T630 554Z"></path><path stroke-width="1" id="MJMATHI-43" d="M50 252Q50 367 117 473T286 641T490 704Q580 704 633 653Q642 643 648 636T656 626L657 623Q660 623 684 649Q691 655 699 663T715 679T725 690L740 705H746Q760 705 760 698Q760 694 728 561Q692 422 692 421Q690 416 687 415T669 413H653Q647 419 647 422Q647 423 648 429T650 449T651 481Q651 552 619 605T510 659Q484 659 454 652T382 628T299 572T226 479Q194 422 175 346T156 222Q156 108 232 58Q280 24 350 24Q441 24 512 92T606 240Q610 253 612 255T628 257Q648 257 648 248Q648 243 647 239Q618 132 523 55T319 -22Q206 -22 128 53T50 252Z"></path></defs></svg>

engineering, electrical & electronic,physics, applied