Controllable Coercive Field of Ferroelectric HfO2 Films via UV-Ozone Surface Modification
Yan Zhang,Dao Wang,Chunlai Luo,Jiayun Cheng,Siying Huo,Beijing Zhang,Ruiqiang Tao,Deyang Chen,Zhen Fan,Ji-Yan Dai,Xubing Lu,J.-M. Liu
DOI: https://doi.org/10.1109/ted.2022.3164856
IF: 3.1
2022-01-01
IEEE Transactions on Electron Devices
Abstract:The endurance limitation related to high coercive fields ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.553ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2391 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-63" x="1762" y="0"></use></g></g></svg></span> ) has been one of the substantial challenges to future memory applications of ferroelectric HfO<sub>2</sub> films. In this work, we demonstrate a simple, efficient, and accurate method to regulate the <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.553ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2391 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-63" x="1762" y="0"></use></g></g></svg></span> value of Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> (HZO) films via interface modification through ultraviolet-ozone (UV-O<sub>3</sub>) irradiation on the surface of bottom electrode. Growth behaviors and ferroelectricity of HZO films were systematically investigated by varying UV-O<sub>3</sub> irradiation time. HZO samples show a well-controlled <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.553ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2391 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-63" x="1762" y="0"></use></g></g></svg></span> upon a suitable UV-O<sub>3</sub> irradiation time. Compared with the <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="3.954ex" height="2.843ex" style="vertical-align: -0.838ex;" viewBox="0 -863.1 1702.5 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-77" x="0" y="0"></use> <use xlink:href="#MJMAIN-2F" x="716" y="0"></use> <use xlink:href="#MJMATHI-6F" x="1217" y="0"></use></g></svg></span> sample, the <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.553ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2391 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-63" x="1762" y="0"></use></g></g></svg></span> value of 30-min irradiated sample drops by ~29.5%, and a comparatively high <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="3.628ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 1562.3 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-32" x="0" y="0"></use><g transform="translate(500,0)"> <use xlink:href="#MJMATHI-50" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-72" x="908" y="-213"></use></g></g></svg></span> of 28.6 <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="9.229ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 3973.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use> <use xlink:href="#MJMATHI-74" x="1451" y="0"></use> <use xlink:href="#MJMATHI-65" x="1812" y="0"></use> <use xlink:href="#MJMATHI-78" x="2279" y="0"></use> <use xlink:href="#MJMATHI-74" x="2851" y="0"></use> <use xlink:href="#MJMATHI-43" x="3213" y="0"></use></g></svg></span> /cm<sup>2</sup> remains. The tuning of <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.553ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2391 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-63" x="1762" y="0"></use></g></g></svg></span> is clarified to be due to the ratio change of orthogonal and tetragonal phases in HZO films, which can be well controlled by the change of surface energy of the bottom 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engineering, electrical & electronic,physics, applied