Integrated Ultrahigh-Sensitivity Temperature Sensor Based on Asymmetric Mach–Zehnder Interferometer and Stress Deformation of Aluminum-SiO 2

Rui Yin,Longdu Liu,Qingjie Huang,Lin Lu,Hongliang Yang,Fengyu Liu,Pengcheng Liu,Wei Ji,Shouzhen Jiang,Jingwen Sun,Xiaojie Yin,Xiaohua Su

DOI: https://doi.org/10.1109/tim.2021.3115206

IF: 5.6

2021-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:This article proposes an integrated high-sensitivity temperature sensor based on SiO₂-asymmetric Mach–Zehnder interferometer (AMZI) and thermal-expansion-induced stress of aluminum-SiO₂. Mechanical analysis of this structure is carried out. The result shows that the SiO₂ chip is compressed, and the waveguide length is decreased, leading to the central wavelength shift of the sensor. The sensitivity of the sensor can be customized by different arm lengths of the AMZI. The chip is fabricated using a standard planar lightwave circuit (PLC), and the aluminum alloy plate is glued to the chip using <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.661ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 2437.5 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-61" x="0" y="0"></use> <use xlink:href="#MJMATHI-6C" x="529" y="0"></use> <use xlink:href="#MJMATHI-70" x="828" y="0"></use> <use xlink:href="#MJMATHI-68" x="1331" y="0"></use> <use xlink:href="#MJMATHI-61" x="1908" y="0"></use></g></svg></span> -cyanaloc acrylic resin adhesive. The sensitivities of two sensors with different arm lengths are tested. The test results show the sensitivity reaches 6.86 and 54.2 nm <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="12.709ex" height="2.676ex" style="vertical-align: -0.338ex;" viewBox="0 -1006.6 5471.9 1152.1" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-63" x="0" y="0"></use> <use xlink:href="#MJMATHI-64" x="433" y="0"></use> <use xlink:href="#MJMATHI-6F" x="957" y="0"></use> <use xlink:href="#MJMATHI-74" x="1442" y="0"></use> <use xlink:href="#MJMATHI-74" x="1804" y="0"></use> <use xlink:href="#MJMATHI-65" x="2165" y="0"></use> <use xlink:href="#MJMATHI-78" x="2632" y="0"></use> <use xlink:href="#MJMATHI-74" x="3204" y="0"></use><g transform="translate(3566,0)"> <use xlink:href="#MJMATHI-4B" x="0" y="0"></use><g transform="translate(901,410)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-2212" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-31" x="778" y="0"></use></g></g></g></svg></span> , respectively, which coincides with the theoretical analysis. 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engineering, electrical & electronic,instruments & instrumentation