A Novel Trapezoidal ScAlN/AlN-Based MEMS Piezoelectric Accelerometer

Bohao Hu,Yan Liu,Binghui Lin,Guoqiang Wu,Wenjuan Liu,Chengliang Sun

DOI: https://doi.org/10.1109/jsen.2021.3101219

IF: 4.3

2021-10-01

IEEE Sensors Journal

Abstract:This paper presents a ScAlN/AlN-based MEMS piezoelectric accelerometer using the trapezoidal with corners (TWC) shaped cantilevers. The composite Sc_0.2Al_0.8N/AlN piezoelectric film is deposited on a silicon-on-insulator (SOI) substrate to improve the sensitivity of the piezoelectric accelerometer. The theoretical and FEM model is established to analyze the relationship between the cantilever stiffness and the piezoelectric parameters on the sensitivity and resonance frequency. The fabricated accelerometer includes a trapezoidal part, a rectangular part, and a silicon proof mass. The experimental results show that the sensitivity, minimum detectable signal (MDS), resolution, and resonant frequency of the proposed TWC shaped accelerometer are 7.95 mV/g, 1 mg, 1 mg, and 1290 Hz, respectively. The manufactured accelerometer exhibits good linearity up to 2 g (non-linearity&lt;0.087%). Moreover, the TWC and Sc components increase the electric output by about 36% compared with the traditional trapezoidal accelerometer. At room temperature ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="8.222ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 3540.1 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-54" x="0" y="0"></use> <use xlink:href="#MJMAIN-3D" x="982" y="0"></use><g transform="translate(2038,0)"> <use xlink:href="#MJMAIN-33"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use> <use xlink:href="#MJMAIN-30" x="1001" y="0"></use></g></g></svg></span> K), the thermal noise of the fabricated accelerometer is lower than 94.7 nV/ <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="4.685ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 2017 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-73" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="469" y="0"></use> <use xlink:href="#MJMATHI-72" x="1042" y="0"></use> <use xlink:href="#MJMATHI-64" x="1493" y="0"></use></g></svg></span> Hz. Meanwhile, the charge amplifier circuit noise is about <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="19.812ex" height="2.843ex" style="vertical-align: -0.838ex;" viewBox="0 -863.1 8530 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-39" x="779" y="0"></use> <use xlink:href="#MJMAIN-37" x="1279" y="0"></use> <use xlink:href="#MJMATHI-6D" x="2030" y="0"></use> <use xlink:href="#MJMATHI-75" x="2908" y="0"></use> <use xlink:href="#MJMATHI-74" x="3481" y="0"></use> <use xlink:href="#MJMATHI-65" x="3842" y="0"></use> <use xlink:href="#MJMATHI-78" x="4309" y="0"></use> <use xlink:href="#MJMATHI-74" x="4881" y="0"></use> <use xlink:href="#MJMATHI-56" x="5243" y="0"></use> <use xlink:href="#MJMAIN-2F" x="6012" y="0"></use> <use xlink:href="#MJMATHI-73" x="6513" y="0"></use> <use xlink:href="#MJMATHI-75" x="6982" y="0"></use> <use xlink:href="#MJMATHI-72" x="7555" y="0"></use> <use xlink:href="#MJMATHI-64" x="8006" y="0"></use></g></svg></span> Hz. The proposed TWC accelerometer is sensitive and suitable to sense vibration acceleration in low-frequency scenarios.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMATHI-54" d="M40 437Q21 437 21 445Q21 450 37 501T71 602L88 651Q93 669 101 677H569H659Q691 677 697 676T704 667Q704 661 687 553T668 444Q668 437 649 437Q640 437 637 437T631 442L629 445Q629 451 635 490T641 551Q641 586 628 604T573 629Q568 630 515 631Q469 631 457 630T439 622Q438 621 368 343T298 60Q298 48 386 46Q418 46 427 45T436 36Q436 31 433 22Q429 4 424 1L422 0Q419 0 415 0Q410 0 363 1T228 2Q99 2 64 0H49Q43 6 43 9T45 27Q49 40 55 46H83H94Q174 46 189 55Q190 56 191 56Q196 59 201 76T241 233Q258 301 269 344Q339 619 339 625Q339 630 310 630H279Q212 630 191 624Q146 614 121 583T67 467Q60 445 57 441T43 437H40Z"></path><path stroke-width="1" id="MJMAIN-3D" d="M56 347Q56 360 70 367H707Q722 359 722 347Q722 336 708 328L390 327H72Q56 332 56 347ZM56 153Q56 168 72 173H708Q722 163 722 153Q722 140 707 133H70Q56 140 56 153Z"></path><path stroke-width="1" id="MJMAIN-33" d="M127 463Q100 463 85 480T69 524Q69 579 117 622T233 665Q268 665 277 664Q351 652 390 611T430 522Q430 470 396 421T302 350L299 348Q299 347 308 345T337 336T375 315Q457 262 457 175Q457 96 395 37T238 -22Q158 -22 100 21T42 130Q42 158 60 175T105 193Q133 193 151 175T169 130Q169 119 166 110T159 94T148 82T136 74T126 70T118 67L114 66Q165 21 238 21Q293 21 321 74Q338 107 338 175V195Q338 290 274 322Q259 328 213 329L171 330L168 332Q166 335 166 348Q166 366 174 366Q202 366 232 371Q266 376 294 413T322 525V533Q322 590 287 612Q265 626 240 626Q208 626 181 615T143 592T132 580H135Q138 579 143 578T153 573T165 566T175 555T183 540T186 520Q186 498 172 481T127 463Z"></path><path stroke-width="1" id="MJMAIN-30" d="M96 585Q152 666 249 666Q297 666 345 640T423 548Q460 465 460 320Q460 165 417 83Q397 41 362 16T301 -15T250 -22Q224 -22 198 -16T137 16T82 83Q39 165 39 320Q39 494 96 585ZM321 597Q291 629 250 629Q208 629 178 597Q153 571 145 525T137 333Q137 175 145 125T181 46Q209 16 250 16Q290 16 318 46Q347 76 354 130T362 333Q362 478 354 524T321 597Z"></path><path stroke-width="1" id="MJMATHI-73" d="M131 289Q131 321 147 354T203 415T300 442Q362 442 390 415T419 355Q419 323 402 308T364 292Q351 292 340 300T328 326Q328 342 337 354T354 372T367 378Q368 378 368 379Q368 382 361 388T336 399T297 405Q249 405 227 379T204 326Q204 301 223 291T278 274T330 259Q396 230 396 163Q396 135 385 107T352 51T289 7T195 -10Q118 -10 86 19T53 87Q53 126 74 143T118 160Q133 160 146 151T160 120Q160 94 142 76T111 58Q109 57 108 57T107 55Q108 52 115 47T146 34T201 27Q237 27 263 38T301 66T318 97T323 122Q323 150 302 164T254 181T195 196T148 231Q131 256 131 289Z"></path><path stroke-width="1" id="MJMATHI-75" d="M21 287Q21 295 30 318T55 370T99 420T158 442Q204 442 227 417T250 358Q250 340 216 246T182 105Q182 62 196 45T238 27T291 44T328 78L339 95Q341 99 377 247Q407 367 413 387T427 416Q444 431 463 431Q480 431 488 421T496 402L420 84Q419 79 419 68Q419 43 426 35T447 26Q469 29 482 57T512 145Q514 153 532 153Q551 153 551 144Q550 139 549 130T540 98T523 55T498 17T462 -8Q454 -10 438 -10Q372 -10 347 46Q345 45 336 36T318 21T296 6T267 -6T233 -11Q189 -11 155 7Q103 38 103 113Q103 170 138 262T173 379Q173 380 173 381Q173 390 173 393T169 400T158 404H154Q131 404 112 385T82 344T65 302T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-72" d="M21 287Q22 290 23 295T28 317T38 348T53 381T73 411T99 433T132 442Q161 442 183 430T214 408T225 388Q227 382 228 382T236 389Q284 441 347 441H350Q398 441 422 400Q430 381 430 363Q430 333 417 315T391 292T366 288Q346 288 334 299T322 328Q322 376 378 392Q356 405 342 405Q286 405 239 331Q229 315 224 298T190 165Q156 25 151 16Q138 -11 108 -11Q95 -11 87 -5T76 7T74 17Q74 30 114 189T154 366Q154 405 128 405Q107 405 92 377T68 316T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-64" d="M366 683Q367 683 438 688T511 694Q523 694 523 686Q523 679 450 384T375 83T374 68Q374 26 402 26Q411 27 422 35Q443 55 463 131Q469 151 473 152Q475 153 483 153H487H491Q506 153 506 145Q506 140 503 129Q490 79 473 48T445 8T417 -8Q409 -10 393 -10Q359 -10 336 5T306 36L300 51Q299 52 296 50Q294 48 292 46Q233 -10 172 -10Q117 -10 75 30T33 157Q33 205 53 255T101 341Q148 398 195 420T280 442Q336 442 364 400Q369 394 369 396Q370 400 396 505T424 616Q424 629 417 632T378 637H357Q351 643 351 645T353 664Q358 683 366 683ZM352 326Q329 405 277 405Q242 405 210 374T160 293Q131 214 119 129Q119 126 119 118T118 106Q118 61 136 44T179 26Q233 26 290 98L298 109L352 326Z"></path><path stroke-width="1" id="MJMAIN-31" d="M213 578L200 573Q186 568 160 563T102 556H83V602H102Q149 604 189 617T245 641T273 663Q275 666 285 666Q294 666 302 660V361L303 61Q310 54 315 52T339 48T401 46H427V0H416Q395 3 257 3Q121 3 100 0H88V46H114Q136 46 152 46T177 47T193 50T201 52T207 57T213 61V578Z"></path><path stroke-width="1" id="MJMAIN-2E" d="M78 60Q78 84 95 102T138 120Q162 120 180 104T199 61Q199 36 182 18T139 0T96 17T78 60Z"></path><path stroke-width="1" id="MJMAIN-39" d="M352 287Q304 211 232 211Q154 211 104 270T44 396Q42 412 42 436V444Q42 537 111 606Q171 666 243 666Q245 666 249 666T257 665H261Q273 665 286 663T323 651T370 619T413 560Q456 472 456 334Q456 194 396 97Q361 41 312 10T208 -22Q147 -22 108 7T68 93T121 149Q143 149 158 135T173 96Q173 78 164 65T148 49T135 44L131 43Q131 41 138 37T164 27T206 22H212Q272 22 313 86Q352 142 352 280V287ZM244 248Q292 248 321 297T351 430Q351 508 343 542Q341 552 337 562T323 588T293 615T246 625Q208 625 181 598Q160 576 154 546T147 441Q147 358 152 329T172 282Q197 248 244 248Z"></path><path stroke-width="1" id="MJMAIN-37" d="M55 458Q56 460 72 567L88 674Q88 676 108 676H128V672Q128 662 143 655T195 646T364 644H485V605L417 512Q408 500 387 472T360 435T339 403T319 367T305 330T292 284T284 230T278 162T275 80Q275 66 275 52T274 28V19Q270 2 255 -10T221 -22Q210 -22 200 -19T179 0T168 40Q168 198 265 368Q285 400 349 489L395 552H302Q128 552 119 546Q113 543 108 522T98 479L95 458V455H55V458Z"></path><path stroke-width="1" id="MJMATHI-6D" d="M21 287Q22 293 24 303T36 341T56 388T88 425T132 442T175 435T205 417T221 395T229 376L231 369Q231 367 232 367L243 378Q303 442 384 442Q401 442 415 440T441 433T460 423T475 411T485 398T493 385T497 373T500 364T502 357L510 367Q573 442 659 442Q713 442 746 415T780 336Q780 285 742 178T704 50Q705 36 709 31T724 26Q752 26 776 56T815 138Q818 149 821 151T837 153Q857 153 857 145Q857 144 853 130Q845 101 831 73T785 17T716 -10Q669 -10 648 17T627 73Q627 92 663 193T700 345Q700 404 656 404H651Q565 404 506 303L499 291L466 157Q433 26 428 16Q415 -11 385 -11Q372 -11 364 -4T353 8T350 18Q350 29 384 161L420 307Q423 322 423 345Q423 404 379 404H374Q288 404 229 303L222 291L189 157Q156 26 151 16Q138 -11 108 -11Q95 -11 87 -5T76 7T74 17Q74 30 112 181Q151 335 151 342Q154 357 154 369Q154 405 129 405Q107 405 92 377T69 316T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-74" d="M26 385Q19 392 19 395Q19 399 22 411T27 425Q29 430 36 430T87 431H140L159 511Q162 522 166 540T173 566T179 586T187 603T197 615T211 624T229 626Q247 625 254 615T261 596Q261 589 252 549T232 470L222 433Q222 431 272 431H323Q330 424 330 420Q330 398 317 385H210L174 240Q135 80 135 68Q135 26 162 26Q197 26 230 60T283 144Q285 150 288 151T303 153H307Q322 153 322 145Q322 142 319 133Q314 117 301 95T267 48T216 6T155 -11Q125 -11 98 4T59 56Q57 64 57 83V101L92 241Q127 382 128 383Q128 385 77 385H26Z"></path><path stroke-width="1" id="MJMATHI-65" d="M39 168Q39 225 58 272T107 350T174 402T244 433T307 442H310Q355 442 388 420T421 355Q421 265 310 237Q261 224 176 223Q139 223 138 221Q138 219 132 186T125 128Q125 81 146 54T209 26T302 45T394 111Q403 121 406 121Q410 121 419 112T429 98T420 82T390 55T344 24T281 -1T205 -11Q126 -11 83 42T39 168ZM373 353Q367 405 305 405Q272 405 244 391T199 357T170 316T154 280T149 261Q149 260 169 260Q282 260 327 284T373 353Z"></path><path stroke-width="1" id="MJMATHI-78" d="M52 289Q59 331 106 386T222 442Q257 442 286 424T329 379Q371 442 430 442Q467 442 494 420T522 361Q522 332 508 314T481 292T458 288Q439 288 427 299T415 328Q415 374 465 391Q454 404 425 404Q412 404 406 402Q368 386 350 336Q290 115 290 78Q290 50 306 38T341 26Q378 26 414 59T463 140Q466 150 469 151T485 153H489Q504 153 504 145Q504 144 502 134Q486 77 440 33T333 -11Q263 -11 227 52Q186 -10 133 -10H127Q78 -10 57 16T35 71Q35 103 54 123T99 143Q142 143 142 101Q142 81 130 66T107 46T94 41L91 40Q91 39 97 36T113 29T132 26Q168 26 194 71Q203 87 217 139T245 247T261 313Q266 340 266 352Q266 380 251 392T217 404Q177 404 142 372T93 290Q91 281 88 280T72 278H58Q52 284 52 289Z"></path><path stroke-width="1" id="MJMATHI-56" d="M52 648Q52 670 65 683H76Q118 680 181 680Q299 680 320 683H330Q336 677 336 674T334 656Q329 641 325 637H304Q282 635 274 635Q245 630 242 620Q242 618 271 369T301 118L374 235Q447 352 520 471T595 594Q599 601 599 609Q599 633 555 637Q537 637 537 648Q537 649 539 661Q542 675 545 679T558 683Q560 683 570 683T604 682T668 681Q737 681 755 683H762Q769 676 769 672Q769 655 760 640Q757 637 743 637Q730 636 719 635T698 630T682 623T670 615T660 608T652 599T645 592L452 282Q272 -9 266 -16Q263 -18 259 -21L241 -22H234Q216 -22 216 -15Q213 -9 177 305Q139 623 138 626Q133 637 76 637H59Q52 642 52 648Z"></path><path stroke-width="1" id="MJMAIN-2F" d="M423 750Q432 750 438 744T444 730Q444 725 271 248T92 -240Q85 -250 75 -250Q68 -250 62 -245T56 -231Q56 -221 230 257T407 740Q411 750 423 750Z"></path></defs></svg>

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