A Miniature Fiber-Optic Silicon Cantilever-Based Acoustic Sensor Using Ultra-High Speed Spectrum Demodulation

Zhenfeng Gong,Haie Li,Xu Jiang,Guojie Wu,Tianli Gao,Min Guo,Fengxiang Ma,Ke Chen,Liang Mei,Wei Peng,Qingxu Yu

DOI: https://doi.org/10.1109/jsen.2021.3098592

IF: 4.3

2021-09-15

IEEE Sensors Journal

Abstract:A silicon cantilever-based fiber-optic acoustic sensor (FOAS) is presented in this work. A rectangular cantilever is fabricated upon a silicon-on-insulator (SOI) wafer using a micro-electro-mechanical system (MEMS). The length, width and thickness of the silicon cantilever are <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="13.571ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 5843 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-35"></use> <use xlink:href="#MJMAIN-33" x="500" y="0"></use> <use xlink:href="#MJMAIN-30" x="1001" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1751" y="0"></use> <use xlink:href="#MJMATHI-75" x="2630" y="0"></use> <use xlink:href="#MJMATHI-74" x="3202" y="0"></use> <use xlink:href="#MJMATHI-65" x="3564" y="0"></use> <use xlink:href="#MJMATHI-78" x="4030" y="0"></use> <use xlink:href="#MJMATHI-74" x="4603" y="0"></use> <use xlink:href="#MJMATHI-6D" x="4964" y="0"></use></g></svg></span> , <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="13.571ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 5843 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-32"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use> <use xlink:href="#MJMAIN-30" x="1001" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1751" y="0"></use> <use xlink:href="#MJMATHI-75" x="2630" y="0"></use> <use xlink:href="#MJMATHI-74" x="3202" y="0"></use> <use xlink:href="#MJMATHI-65" x="3564" y="0"></use> <use xlink:href="#MJMATHI-78" x="4030" y="0"></use> <use xlink:href="#MJMATHI-74" x="4603" y="0"></use> <use xlink:href="#MJMATHI-6D" x="4964" y="0"></use></g></svg></span> and <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.246ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 4842 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-33" x="0" y="0"></use> <use xlink:href="#MJMATHI-6D" x="750" y="0"></use> <use xlink:href="#MJMATHI-75" x="1629" y="0"></use> <use xlink:href="#MJMATHI-74" x="2201" y="0"></use> <use xlink:href="#MJMATHI-65" x="2563" y="0"></use> <use xlink:href="#MJMATHI-78" x="3029" y="0"></use> <use xlink:href="#MJMATHI-74" x="3602" y="0"></use> <use xlink:href="#MJMATHI-6D" x="3963" y="0"></use></g></svg></span> , respectively. The resonant frequency of the silicon cantilever is 14820 Hz with a sensitivity of 950 nm/Pa. An ultra-high speed absolute cavity length demodulation method is adopted using a complementary metal oxide semiconductor (CMOS) spectrometer and an 850 nm superluminescent light emitting diode (SLED). A modified Buneman frequency estimation and total phase demodulation algorithm is adopted. The frequency response curve shows a relatively flat trend from 20 Hz to 13 kHz. The sensor exhibits good linearities at different frequencies while the applied acoustic pressure is increased from 0 Pa to 2.5 Pa. Experimental results indicate that the minimum detectable pressure (MDP) of the proposed FOAS is calculated to be <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="9.247ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 3981.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-32"></use> <use xlink:href="#MJMAIN-35" x="500" y="0"></use> <use xlink:href="#MJMAIN-2E" x="1001" y="0"></use> <use xlink:href="#MJMAIN-36" x="1279" y="0"></use> <use xlink:href="#MJMAIN-38" x="1780" y="0"></use> <use xlink:href="#MJMATHI-6D" x="2530" y="0"></use> <use xlink:href="#MJMATHI-75" x="3409" y="0"></use></g></svg></span> Pa/Hz^1/2 at the frequency of 13 kHz. 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