Low-Loss Heterogeneous Integrations With High Output Power Radar Applications at W-Band

Xiao Yang,Yin-Shan Huang,Liang Zhou,Zhe Zhao,Dong-Xin Ni,Cheng-Rui Zhang,Jun-Fa Mao,Jiang-An Han,Xu Cheng,Xian-Jin Deng

DOI: https://doi.org/10.1109/jssc.2021.3106444

2021-01-01

Abstract:This study presents a design of a 94-GHz high-performance and highly compact frequency-modulated continuous-wave radar sensor. In this sensor, an <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="1.98ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 852.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-58" x="0" y="0"></use></g></svg></span> -band CMOS-based all-digital phase-locked loop chip, <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="2.435ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 1048.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-57" x="0" y="0"></use></g></svg></span> -band SiGe-based transceiver monolithic microwave integrated circuit (MMIC), and <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="2.435ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 1048.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-57" x="0" y="0"></use></g></svg></span> -band GaN-based MMIC power amplifier (PA) are heterogeneously integrated (HI). Each part of the 130-nm bipolar complementary metal-oxide-semiconductor (BiCMOS) SiGe-based transceiver MMIC is designed to include a low-noise amplifier, PA, octupler, mixer, and lange coupler. The fabrication process of our in-house silicon-based MEMS photosensitive composite film is developed to provide very high-density integration and very low insertion loss of interconnections between chips. The HI front end of the radar sensor is measured on-wafer with a high output power of 22 dBm. Moreover, a low double-sideband noise figure (NF) of 10.2 dB is obtained. Bonding–substrate integrated waveguide (SIW)–WG transitions between the heterogeneously integrated front end and the antenna are specially designed and verified. A 2.3-dB degradation is observed, where 19.7 dBm is measured at the transmitter WG WR-10-flange. Thus, the sensor offers a 55-dB dynamic range at a 2-m position with an expectation of a long-distance target-detection range. The radar sensor has an 11.7-cm range resolution and is only <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="16.363ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 7045 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-36"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use> <use xlink:href="#MJMATHI-74" x="1001" y="0"></use> <use xlink:href="#MJMATHI-69" x="1362" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1708" y="0"></use> <use xlink:href="#MJMATHI-65" x="2586" y="0"></use> <use xlink:href="#MJMATHI-73" x="3053" y="0"></use><g transform="translate(3522,0)"> <use xlink:href="#MJMAIN-34"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use></g> <use xlink:href="#MJMATHI-74" x="4523" y="0"></use> <use xlink:href="#MJMATHI-69" x="4885" y="0"></use> <use xlink:href="#MJMATHI-6D" x="5230" 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engineering, electrical & electronic