An Ultra-Sensitive Fiber Sensor for Micro-Newton Contact Force Detection Based on a Polymerized Hollow-Cylinder by One-Step Fabrication

Changpeng Lang,Yi Liu,Jingfu Ye,Min Chen,Yan Li,Shiliang Qu

DOI: https://doi.org/10.1109/jsen.2021.3110783

IF: 4.3

2021-11-15

IEEE Sensors Journal

Abstract:An ultra-sensitive contact force sensor based on a polymerized hollow-cylinder lying on the end-face of single-mode fiber is proposed. The whole hollow-cylinder is polymerized in a single illumination with an annular beam, which is generated by a section of multimode fiber without resorting to any expensive instruments. It is fixed on the end-face of the fiber with UV-glue, working as a Fabry-Perot cavity. Owing to both the hollow structure and the low Young's modulus of polymer, experimental results show the contact force sensitivity of the sensor reaches as high as 1.08 nm / <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="9.526ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 4101.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use> <use xlink:href="#MJMATHI-74" x="1451" y="0"></use> <use xlink:href="#MJMATHI-65" x="1812" y="0"></use> <use xlink:href="#MJMATHI-78" x="2279" y="0"></use> <use xlink:href="#MJMATHI-74" x="2851" y="0"></use> <use xlink:href="#MJMATHI-4E" x="3213" y="0"></use></g></svg></span> , and the detection resolution of the sensor is <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="13.078ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 5631 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-30"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-32" x="779" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1529" y="0"></use> <use xlink:href="#MJMATHI-75" x="2408" y="0"></use> <use xlink:href="#MJMATHI-74" x="2980" y="0"></use> <use xlink:href="#MJMATHI-65" x="3342" y="0"></use> <use xlink:href="#MJMATHI-78" x="3808" y="0"></use> <use xlink:href="#MJMATHI-74" x="4381" y="0"></use> <use xlink:href="#MJMATHI-4E" x="4742" y="0"></use></g></svg></span> .<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMATHI-6D" d="M21 287Q22 293 24 303T36 341T56 388T88 425T132 442T175 435T205 417T221 395T229 376L231 369Q231 367 232 367L243 378Q303 442 384 442Q401 442 415 440T441 433T460 423T475 411T485 398T493 385T497 373T500 364T502 357L510 367Q573 442 659 442Q713 442 746 415T780 336Q780 285 742 178T704 50Q705 36 709 31T724 26Q752 26 776 56T815 138Q818 149 821 151T837 153Q857 153 857 145Q857 144 853 130Q845 101 831 73T785 17T716 -10Q669 -10 648 17T627 73Q627 92 663 193T700 345Q700 404 656 404H651Q565 404 506 303L499 291L466 157Q433 26 428 16Q415 -11 385 -11Q372 -11 364 -4T353 8T350 18Q350 29 384 161L420 307Q423 322 423 345Q423 404 379 404H374Q288 404 229 303L222 291L189 157Q156 26 151 16Q138 -11 108 -11Q95 -11 87 -5T76 7T74 17Q74 30 112 181Q151 335 151 342Q154 357 154 369Q154 405 129 405Q107 405 92 377T69 316T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-75" d="M21 287Q21 295 30 318T55 370T99 420T158 442Q204 442 227 417T250 358Q250 340 216 246T182 105Q182 62 196 45T238 27T291 44T328 78L339 95Q341 99 377 247Q407 367 413 387T427 416Q444 431 463 431Q480 431 488 421T496 402L420 84Q419 79 419 68Q419 43 426 35T447 26Q469 29 482 57T512 145Q514 153 532 153Q551 153 551 144Q550 139 549 130T540 98T523 55T498 17T462 -8Q454 -10 438 -10Q372 -10 347 46Q345 45 336 36T318 21T296 6T267 -6T233 -11Q189 -11 155 7Q103 38 103 113Q103 170 138 262T173 379Q173 380 173 381Q173 390 173 393T169 400T158 404H154Q131 404 112 385T82 344T65 302T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-74" d="M26 385Q19 392 19 395Q19 399 22 411T27 425Q29 430 36 430T87 431H140L159 511Q162 522 166 540T173 566T179 586T187 603T197 615T211 624T229 626Q247 625 254 615T261 596Q261 589 252 549T232 470L222 433Q222 431 272 431H323Q330 424 330 420Q330 398 317 385H210L174 240Q135 80 135 68Q135 26 162 26Q197 26 230 60T283 144Q285 150 288 151T303 153H307Q322 153 322 145Q322 142 319 133Q314 117 301 95T267 48T216 6T155 -11Q125 -11 98 4T59 56Q57 64 57 83V101L92 241Q127 382 128 383Q128 385 77 385H26Z"></path><path stroke-width="1" id="MJMATHI-65" d="M39 168Q39 225 58 272T107 350T174 402T244 433T307 442H310Q355 442 388 420T421 355Q421 265 310 237Q261 224 176 223Q139 223 138 221Q138 219 132 186T125 128Q125 81 146 54T209 26T302 45T394 111Q403 121 406 121Q410 121 419 112T429 98T420 82T390 55T344 24T281 -1T205 -11Q126 -11 83 42T39 168ZM373 353Q367 405 305 405Q272 405 244 391T199 357T170 316T154 280T149 261Q149 260 169 260Q282 260 327 284T373 353Z"></path><path stroke-width="1" id="MJMATHI-78" d="M52 289Q59 331 106 386T222 442Q257 442 286 424T329 379Q371 442 430 442Q467 442 494 420T522 361Q522 332 508 314T481 292T458 288Q439 288 427 299T415 328Q415 374 465 391Q454 404 425 404Q412 404 406 402Q368 386 350 336Q290 115 290 78Q290 50 306 38T341 26Q378 26 414 59T463 140Q466 150 469 151T485 153H489Q504 153 504 145Q504 144 502 134Q486 77 440 33T333 -11Q263 -11 227 52Q186 -10 133 -10H127Q78 -10 57 16T35 71Q35 103 54 123T99 143Q142 143 142 101Q142 81 130 66T107 46T94 41L91 40Q91 39 97 36T113 29T132 26Q168 26 194 71Q203 87 217 139T245 247T261 313Q266 340 266 352Q266 380 251 392T217 404Q177 404 142 372T93 290Q91 281 88 280T72 278H58Q52 284 52 289Z"></path><path stroke-width="1" id="MJMATHI-4E" d="M234 637Q231 637 226 637Q201 637 196 638T191 649Q191 676 202 682Q204 683 299 683Q376 683 387 683T401 677Q612 181 616 168L670 381Q723 592 723 606Q723 633 659 637Q635 637 635 648Q635 650 637 660Q641 676 643 679T653 683Q656 683 684 682T767 680Q817 680 843 681T873 682Q888 682 888 672Q888 650 880 642Q878 637 858 637Q787 633 769 597L620 7Q618 0 599 0Q585 0 582 2Q579 5 453 305L326 604L261 344Q196 88 196 79Q201 46 268 46H278Q284 41 284 38T282 19Q278 6 272 0H259Q228 2 151 2Q123 2 100 2T63 2T46 1Q31 1 31 10Q31 14 34 26T39 40Q41 46 62 46Q130 49 150 85Q154 91 221 362L289 634Q287 635 234 637Z"></path><path stroke-width="1" id="MJMAIN-30" d="M96 585Q152 666 249 666Q297 666 345 640T423 548Q460 465 460 320Q460 165 417 83Q397 41 362 16T301 -15T250 -22Q224 -22 198 -16T137 16T82 83Q39 165 39 320Q39 494 96 585ZM321 597Q291 629 250 629Q208 629 178 597Q153 571 145 525T137 333Q137 175 145 125T181 46Q209 16 250 16Q290 16 318 46Q347 76 354 130T362 333Q362 478 354 524T321 597Z"></path><path stroke-width="1" id="MJMAIN-2E" d="M78 60Q78 84 95 102T138 120Q162 120 180 104T199 61Q199 36 182 18T139 0T96 17T78 60Z"></path><path stroke-width="1" id="MJMAIN-32" d="M109 429Q82 429 66 447T50 491Q50 562 103 614T235 666Q326 666 387 610T449 465Q449 422 429 383T381 315T301 241Q265 210 201 149L142 93L218 92Q375 92 385 97Q392 99 409 186V189H449V186Q448 183 436 95T421 3V0H50V19V31Q50 38 56 46T86 81Q115 113 136 137Q145 147 170 174T204 211T233 244T261 278T284 308T305 340T320 369T333 401T340 431T343 464Q343 527 309 573T212 619Q179 619 154 602T119 569T109 550Q109 549 114 549Q132 549 151 535T170 489Q170 464 154 447T109 429Z"></path></defs></svg>

engineering, electrical & electronic,instruments & instrumentation,physics, applied