Mould-Free Skin-Inspired Robust and Sensitive Flexible Pressure Sensors With Hierarchical Microstructures

Chao Ma,Dong Xu,Wenfeng Liu,Tianyu Dong,Sheng-Tao Li
DOI: https://doi.org/10.1109/led.2021.3109035
IF: 4.8157
2021-10-01
IEEE Electron Device Letters
Abstract:Flexible microscopic pressure sensors are important to the emerging fields of intelligent robots and advanced healthcare. However, common microstructured pressure sensors often require sophisticated mould and/or material preparation, and yield limited pressure sensing performances. In this letter, we report a facile approach to design a scalable and stretchable mould-free sensitive layer with a unique hierarchical microstructure. Inspired by natural skin, a sensitive layer with interdigitated electrodes is utilized to constructed into resistive pressure sensors, which are able to robustly detect the pressure variations with high sensitivity in a wide dynamic range (about <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="10.912ex" height="2.843ex" style="vertical-align: -0.671ex;" viewBox="0 -934.9 4698.2 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-33"></use> <use xlink:href="#MJMAIN-33" x="500" y="0"></use> <use xlink:href="#MJMAIN-2C" x="1001" y="0"></use> <use xlink:href="#MJMAIN-2C" x="1446" y="0"></use> <use xlink:href="#MJMATHI-6B" x="1891" y="0"></use> <use xlink:href="#MJMATHI-50" x="2412" y="0"></use><g transform="translate(3164,0)"> <use xlink:href="#MJMATHI-61" x="0" y="0"></use><g transform="translate(529,362)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-2212" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-31" x="778" y="0"></use></g></g></g></svg></span> below 5 kPa, more than <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.559ex" height="2.843ex" style="vertical-align: -0.671ex;" viewBox="0 -934.9 4976.7 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-30"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-36" x="779" y="0"></use> <use xlink:href="#MJMAIN-2C" x="1279" y="0"></use> <use xlink:href="#MJMAIN-2C" x="1724" y="0"></use> <use xlink:href="#MJMATHI-6B" x="2169" y="0"></use> <use xlink:href="#MJMATHI-50" x="2691" y="0"></use><g transform="translate(3442,0)"> <use xlink:href="#MJMATHI-61" x="0" y="0"></use><g transform="translate(529,362)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-2212" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-31" x="778" y="0"></use></g></g></g></svg></span> under 108 kPa), also deliver low hysteresis (within 8%), rapid response (less than 48 ms), and ultralow operation voltage ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="8.063ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 3471.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use><g transform="translate(1251,0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use></g> <use xlink:href="#MJMATHI-56" x="2702" y="0"></use></g></svg></span> ). We illustrate that such self-patterned high-performance pressure sensors can be applied to convert the pressure stimulus into spike-like signals in both low- and medium-pressure regimes, and are being able to clearly reveal the details of human pulse wave.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMAIN-33" d="M127 463Q100 463 85 480T69 524Q69 579 117 622T233 665Q268 665 277 664Q351 652 390 611T430 522Q430 470 396 421T302 350L299 348Q299 347 308 345T337 336T375 315Q457 262 457 175Q457 96 395 37T238 -22Q158 -22 100 21T42 130Q42 158 60 175T105 193Q133 193 151 175T169 130Q169 119 166 110T159 94T148 82T136 74T126 70T118 67L114 66Q165 21 238 21Q293 21 321 74Q338 107 338 175V195Q338 290 274 322Q259 328 213 329L171 330L168 332Q166 335 166 348Q166 366 174 366Q202 366 232 371Q266 376 294 413T322 525V533Q322 590 287 612Q265 626 240 626Q208 626 181 615T143 592T132 580H135Q138 579 143 578T153 573T165 566T175 555T183 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engineering, electrical & electronic
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