Characterization and Analysis on Performance and Avalanche Reliability of SiC MOSFETs With Varied JFET Region Width

Zhengyun Zhu,Na Ren,Hongyi Xu,Li Liu,Kuang Sheng
DOI: https://doi.org/10.1109/ted.2021.3091043
IF: 3.1
2021-08-01
IEEE Transactions on Electron Devices
Abstract:In this work, the influence of JFET region width on device's performance and avalanche reliability is studied on 1200 V planar-gate silicon carbide (SiC) MOSFETs fabricated on a 4-in SiC wafer. Unclamped inductive switching (UIS) test is conducted to compare the devices under tests (DUTs) avalanche capability at both <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.094ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 4776.6 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-155)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-47" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-53" x="786" y="0"></use></g></g> <use xlink:href="#MJMAIN-3D" x="3219" y="0"></use> <use xlink:href="#MJMAIN-30" x="4276" y="0"></use></g></svg></span> V and <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="12.902ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 5555.1 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-155)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-47" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-53" x="786" y="0"></use></g></g> <use xlink:href="#MJMAIN-3D" x="3219" y="0"></use> <use xlink:href="#MJMAIN-2212" x="4276" y="0"></use> <use xlink:href="#MJMAIN-35" x="5054" y="0"></use></g></svg></span> V. At <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.094ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 4776.6 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-155)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-47" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-53" x="786" y="0"></use></g></g> <use xlink:href="#MJMAIN-3D" x="3219" y="0"></use> <use xlink:href="#MJMAIN-30" x="4276" y="0"></use></g></svg></span> V, the best avalanche reliability is achieved with a JFET region width of <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.246ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 4842 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-34" x="0" y="0"></use> <use xlink:href="#MJMATHI-6D" x="750" y="0"></use> <use xlink:href="#MJMATHI-75" x="1629" y="0"></use> <use xlink:href="#MJMATHI-74" x="2201" y="0"></use> <use xlink:href="#MJMATHI-65" x="2563" y="0"></use> <use xlink:href="#MJMATHI-78" x="3029" y="0"></use> <use xlink:href="#MJMATHI-74" x="3602" y="0"></use> <use xlink:href="#MJMATHI-6D" x="3963" y="0"></use></g></svg></span> . Through mix-mode TCAD simulation, channel conduction is found to contribute to the failure at <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.094ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 4776.6 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-155)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-47" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-53" x="786" y="0"></use></g></g> <use xlink:href="#MJMAIN-3D" x="3219" y="0"></use> <use xlink:href="#MJMAIN-30" x="4276" y="0"></use></g></svg></span> V. While at <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="12.902ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 5555.1 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-155)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-47" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-53" x="786" y="0"></use></g></g> <use xlink:href="#MJMAIN-3D" x="3219" y="0"></use> <use xlink:href="#MJMAIN-2212" x="4276" y="0"></use> <use xlink:href="#MJMAIN-35" x="5054" y="0"></use></g></svg></span> V, the best avalanche reliability is achieved with a JFET region width ranging from 2 to <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.246ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 4842 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-33" x="0" y="0"></use> <use xlink:href="#MJMATHI-6D" x="750" y="0"></use> <use xlink:href="#MJMATHI-75" x="1629" y="0"></use> <use xlink:href="#MJMATHI-74" x="2201" y="0"></use> <use xlink:href="#MJMATHI-65" x="2563" y="0"></use> <use xlink:href="#MJMATHI-78" x="3029" y="0"></use> <use xlink:href="#MJMATHI-74" x="3602" y="0"></use> <use xlink:href="#MJMATHI-6D" x="3963" y="0"></use></g></svg></span> . Hole injection is observed in the test and recognized in simulation, which critically influences the DUTs' avalanche reliability at <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="12.902ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 5555.1 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-155)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-47" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-53" x="786" y="0"></use></g></g> <use xlink:href="#MJMAIN-3D" x="3219" y="0"></use> <use xlink:href="#MJMAIN-2212" x="4276" y="0"></use> <use xlink:href="#MJMAIN-35" x="5054" y="0"></use></g></svg></span> V.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMATHI-56" d="M52 648Q52 670 65 683H76Q118 680 181 680Q299 680 320 683H330Q336 677 336 674T334 656Q329 641 325 637H304Q282 635 274 635Q245 630 242 620Q242 618 271 369T301 118L374 235Q447 352 520 471T595 594Q599 601 599 609Q599 633 555 637Q537 637 537 648Q537 649 539 661Q542 675 545 679T558 683Q560 683 570 683T604 682T668 681Q737 681 755 683H762Q769 676 769 672Q769 655 760 640Q757 637 743 637Q730 636 719 635T698 630T682 623T670 615T660 608T652 599T645 592L452 282Q272 -9 266 -16Q263 -18 259 -21L241 -22H234Q216 -22 216 -15Q213 -9 177 305Q139 623 138 626Q133 637 76 637H59Q52 642 52 648Z"></path><path stroke-width="1" id="MJMATHI-74" d="M26 385Q19 392 19 395Q19 399 22 411T27 425Q29 430 36 430T87 431H140L159 511Q162 522 166 540T173 566T179 586T187 603T197 615T211 624T229 626Q247 625 254 615T261 596Q261 589 252 549T232 470L222 433Q222 431 272 431H323Q330 424 330 420Q330 398 317 385H210L174 240Q135 80 135 68Q135 26 162 26Q197 26 230 60T283 144Q285 150 288 151T303 153H307Q322 153 322 145Q322 142 319 133Q314 117 301 95T267 48T216 6T155 -11Q125 -11 98 4T59 56Q57 64 57 83V101L92 241Q127 382 128 383Q128 385 77 385H26Z"></path><path stroke-width="1" id="MJMATHI-65" d="M39 168Q39 225 58 272T107 350T174 402T244 433T307 442H310Q355 442 388 420T421 355Q421 265 310 237Q261 224 176 223Q139 223 138 221Q138 219 132 186T125 128Q125 81 146 54T209 26T302 45T394 111Q403 121 406 121Q410 121 419 112T429 98T420 82T390 55T344 24T281 -1T205 -11Q126 -11 83 42T39 168ZM373 353Q367 405 305 405Q272 405 244 391T199 357T170 316T154 280T149 261Q149 260 169 260Q282 260 327 284T373 353Z"></path><path stroke-width="1" id="MJMATHI-78" d="M52 289Q59 331 106 386T222 442Q257 442 286 424T329 379Q371 442 430 442Q467 442 494 420T522 361Q522 332 508 314T481 292T458 288Q439 288 427 299T415 328Q415 374 465 391Q454 404 425 404Q412 404 406 402Q368 386 350 336Q290 115 290 78Q290 50 306 38T341 26Q378 26 414 59T463 140Q466 150 469 151T485 153H489Q504 153 504 145Q504 144 502 134Q486 77 440 33T333 -11Q263 -11 227 52Q186 -10 133 -10H127Q78 -10 57 16T35 71Q35 103 54 123T99 143Q142 143 142 101Q142 81 130 66T107 46T94 41L91 40Q91 39 97 36T113 29T132 26Q168 26 194 71Q203 87 217 139T245 247T261 313Q266 340 266 352Q266 380 251 392T217 404Q177 404 142 372T93 290Q91 281 88 280T72 278H58Q52 284 52 289Z"></path><path stroke-width="1" id="MJMATHI-47" d="M50 252Q50 367 117 473T286 641T490 704Q580 704 633 653Q642 643 648 636T656 626L657 623Q660 623 684 649Q691 655 699 663T715 679T725 690L740 705H746Q760 705 760 698Q760 694 728 561Q692 422 692 421Q690 416 687 415T669 413H653Q647 419 647 422Q647 423 648 429T650 449T651 481Q651 552 619 605T510 659Q492 659 471 656T418 643T357 615T294 567T236 496T189 394T158 260Q156 242 156 221Q156 173 170 136T206 79T256 45T308 28T353 24Q407 24 452 47T514 106Q517 114 529 161T541 214Q541 222 528 224T468 227H431Q425 233 425 235T427 254Q431 267 437 273H454Q494 271 594 271Q634 271 659 271T695 272T707 272Q721 272 721 263Q721 261 719 249Q714 230 709 228Q706 227 694 227Q674 227 653 224Q646 221 643 215T629 164Q620 131 614 108Q589 6 586 3Q584 1 581 1Q571 1 553 21T530 52Q530 53 528 52T522 47Q448 -22 322 -22Q201 -22 126 55T50 252Z"></path><path stroke-width="1" id="MJMATHI-53" d="M308 24Q367 24 416 76T466 197Q466 260 414 284Q308 311 278 321T236 341Q176 383 176 462Q176 523 208 573T273 648Q302 673 343 688T407 704H418H425Q521 704 564 640Q565 640 577 653T603 682T623 704Q624 704 627 704T632 705Q645 705 645 698T617 577T585 459T569 456Q549 456 549 465Q549 471 550 475Q550 478 551 494T553 520Q553 554 544 579T526 616T501 641Q465 662 419 662Q362 662 313 616T263 510Q263 480 278 458T319 427Q323 425 389 408T456 390Q490 379 522 342T554 242Q554 216 546 186Q541 164 528 137T492 78T426 18T332 -20Q320 -22 298 -22Q199 -22 144 33L134 44L106 13Q83 -14 78 -18T65 -22Q52 -22 52 -14Q52 -11 110 221Q112 227 130 227H143Q149 221 149 216Q149 214 148 207T144 186T142 153Q144 114 160 87T203 47T255 29T308 24Z"></path><path stroke-width="1" id="MJMAIN-3D" d="M56 347Q56 360 70 367H707Q722 359 722 347Q722 336 708 328L390 327H72Q56 332 56 347ZM56 153Q56 168 72 173H708Q722 163 722 153Q722 140 707 133H70Q56 140 56 153Z"></path><path stroke-width="1" id="MJMAIN-30" d="M96 585Q152 666 249 666Q297 666 345 640T423 548Q460 465 460 320Q460 165 417 83Q397 41 362 16T301 -15T250 -22Q224 -22 198 -16T137 16T82 83Q39 165 39 320Q39 494 96 585ZM321 597Q291 629 250 629Q208 629 178 597Q153 571 145 525T137 333Q137 175 145 125T181 46Q209 16 250 16Q290 16 318 46Q347 76 354 130T362 333Q362 478 354 524T321 597Z"></path><path stroke-width="1" id="MJMAIN-2212" d="M84 237T84 250T98 270H679Q694 262 694 250T679 230H98Q84 237 84 250Z"></path><path stroke-width="1" id="MJMAIN-35" d="M164 157Q164 133 148 117T109 101H102Q148 22 224 22Q294 22 326 82Q345 115 345 210Q345 313 318 349Q292 382 260 382H254Q176 382 136 314Q132 307 129 306T114 304Q97 304 95 310Q93 314 93 485V614Q93 664 98 664Q100 666 102 666Q103 666 123 658T178 642T253 634Q324 634 389 662Q397 666 402 666Q410 666 410 648V635Q328 538 205 538Q174 538 149 544L139 546V374Q158 388 169 396T205 412T256 420Q337 420 393 355T449 201Q449 109 385 44T229 -22Q148 -22 99 32T50 154Q50 178 61 192T84 210T107 214Q132 214 148 197T164 157Z"></path><path stroke-width="1" id="MJMAIN-34" d="M462 0Q444 3 333 3Q217 3 199 0H190V46H221Q241 46 248 46T265 48T279 53T286 61Q287 63 287 115V165H28V211L179 442Q332 674 334 675Q336 677 355 677H373L379 671V211H471V165H379V114Q379 73 379 66T385 54Q393 47 442 46H471V0H462ZM293 211V545L74 212L183 211H293Z"></path><path stroke-width="1" id="MJMATHI-6D" d="M21 287Q22 293 24 303T36 341T56 388T88 425T132 442T175 435T205 417T221 395T229 376L231 369Q231 367 232 367L243 378Q303 442 384 442Q401 442 415 440T441 433T460 423T475 411T485 398T493 385T497 373T500 364T502 357L510 367Q573 442 659 442Q713 442 746 415T780 336Q780 285 742 178T704 50Q705 36 709 31T724 26Q752 26 776 56T815 138Q818 149 821 151T837 153Q857 153 857 145Q857 144 853 130Q845 101 831 73T785 17T716 -10Q669 -10 648 17T627 73Q627 92 663 193T700 345Q700 404 656 404H651Q565 404 506 303L499 291L466 157Q433 26 428 16Q415 -11 385 -11Q372 -11 364 -4T353 8T350 18Q350 29 384 161L420 307Q423 322 423 345Q423 404 379 404H374Q288 404 229 303L222 291L189 157Q156 26 151 16Q138 -11 108 -11Q95 -11 87 -5T76 7T74 17Q74 30 112 181Q151 335 151 342Q154 357 154 369Q154 405 129 405Q107 405 92 377T69 316T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-75" d="M21 287Q21 295 30 318T55 370T99 420T158 442Q204 442 227 417T250 358Q250 340 216 246T182 105Q182 62 196 45T238 27T291 44T328 78L339 95Q341 99 377 247Q407 367 413 387T427 416Q444 431 463 431Q480 431 488 421T496 402L420 84Q419 79 419 68Q419 43 426 35T447 26Q469 29 482 57T512 145Q514 153 532 153Q551 153 551 144Q550 139 549 130T540 98T523 55T498 17T462 -8Q454 -10 438 -10Q372 -10 347 46Q345 45 336 36T318 21T296 6T267 -6T233 -11Q189 -11 155 7Q103 38 103 113Q103 170 138 262T173 379Q173 380 173 381Q173 390 173 393T169 400T158 404H154Q131 404 112 385T82 344T65 302T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMAIN-33" d="M127 463Q100 463 85 480T69 524Q69 579 117 622T233 665Q268 665 277 664Q351 652 390 611T430 522Q430 470 396 421T302 350L299 348Q299 347 308 345T337 336T375 315Q457 262 457 175Q457 96 395 37T238 -22Q158 -22 100 21T42 130Q42 158 60 175T105 193Q133 193 151 175T169 130Q169 119 166 110T159 94T148 82T136 74T126 70T118 67L114 66Q165 21 238 21Q293 21 321 74Q338 107 338 175V195Q338 290 274 322Q259 328 213 329L171 330L168 332Q166 335 166 348Q166 366 174 366Q202 366 232 371Q266 376 294 413T322 525V533Q322 590 287 612Q265 626 240 626Q208 626 181 615T143 592T132 580H135Q138 579 143 578T153 573T165 566T175 555T183 540T186 520Q186 498 172 481T127 463Z"></path></defs></svg>
engineering, electrical & electronic,physics, applied
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