Improved Gate Reliability Normally-Off p-GaN/AlN/AlGaN/GaN HEMT With AlGaN Cap-Layer

Chia-Hao Liu,Hsien-Chin Chiu,Hsiang-Chun Wang,Hsuan-Ling Kao,Chong-Rong Huang

DOI: https://doi.org/10.1109/led.2021.3109054

IF: 4.8157

2021-10-01

IEEE Electron Device Letters

Abstract:In this work, the dual junction-high-electron-mobility-transistor (DJ-HEMT) was investigated. The thin AlGaN was grown between the p-GaN gate and gate metal. In the TCAD simulations, the band gap and electric field were shown in this letter, proving the dual junction forming. Moreover, DJ-HEMT shows the high gate voltage swing due to the dual junction at the gate region of device, which enhance gate performance. By contrast with standard p-GaN HEMT (ST-HEMT), DJ-HEMT shows higher <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="11.19ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 4817.8 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-74" x="0" y="0"></use> <use xlink:href="#MJMATHI-65" x="361" y="0"></use> <use xlink:href="#MJMATHI-78" x="828" y="0"></use> <use xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1762,0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-54" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-48" x="704" y="0"></use></g></g></g></g></svg></span> of 2V, saturation current of 187mA/mm, <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="24.074ex" height="2.843ex" style="vertical-align: -0.838ex;" viewBox="0 -863.1 10365.3 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-74" x="0" y="0"></use> <use xlink:href="#MJMATHI-65" x="361" y="0"></use> <use xlink:href="#MJMATHI-78" x="828" y="0"></use> <use xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1762,0)"> <use xlink:href="#MJMATHI-49" x="0" y="0"></use><g transform="translate(440,-155)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-4F" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-4E" x="763" y="0"></use></g></g></g> <use xlink:href="#MJMAIN-2F" x="4716" y="0"></use> <use xlink:href="#MJMATHI-74" x="5217" y="0"></use> <use xlink:href="#MJMATHI-65" x="5578" y="0"></use> <use xlink:href="#MJMATHI-78" x="6045" y="0"></use> <use xlink:href="#MJMATHI-74" x="6617" y="0"></use><g transform="translate(6979,0)"> <use xlink:href="#MJMATHI-49" x="0" y="0"></use><g transform="translate(440,-155)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-4F" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-46" x="763" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-46" x="1513" y="0"></use></g></g></g></g></svg></span> ratio of <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="12.207ex" height="2.676ex" style="vertical-align: -0.338ex;" viewBox="0 -1006.6 5255.9 1152.1" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-35"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-31" x="779" y="0"></use> <use xlink:href="#MJMATHI-74" x="1279" y="0"></use> <use xlink:href="#MJMATHI-69" x="1641" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1986" y="0"></use> <use xlink:href="#MJMATHI-65" x="2865" y="0"></use> <use xlink:href="#MJMATHI-73" x="3331" y="0"></use><g transform="translate(3801,0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-38" x="1415" y="557"></use></g></g></svg></span> and gate swing voltage which is higher than 20V. 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