Abstract:Tungsten diselenide (WSe2), a typical semiconducting transition metal dichalcogenides (TMDs), have recently emerged as a promising two-dimensional (2D) material for potential applications in electronic and optoelectronic devices. Extraordinary physical phenomena such as valley Hall effect, valley Zeeman effect, thickness-dependent band structures have been discovered recently in TMDs mainly through optical characterizations. The intrinsic transport characteristics of TMDs, however, have not been well studied because of extrinsic factors such as the electrode contact problems and charged traps in TMD devices. These problems are also reflected by the low carrier mobility in WSe2 (the highest mobility so far reported is about 600 cm2/V s). Here, we demonstrate a new kind of van der Waals heterostructure which consists of a few-layer WSe2 encapsulated between insulating hexagonal boron nitride (h-BN) sheets. High-quality Ohmic contacts at low temperatures are achieved between the metal electrodes and WSe2 based on a selective etching process for h-BN, and the electrode contact resistance is in the range of 0.2-0.5 k{\Omega}{\mu}m which is sufficiently low for detecting the intrinsic transport properties of few-layer WSe2 and its quantum oscillations. Because of clean interfaces between h-BN and WSe2, BN/WSe2/BN heterostructured devices show ultrahigh field-effect mobility (up to 6236 cm2/V s) at low temperatures. The high quality of the BN/WSe2/BN devices is further verified by the high electron mobility extracted from Hall-effect measurements (over 4200 cm2/V s), metal-insulator transitions at low carrier density (in the order of 1011 cm-2) and interesting features of Shubnikov-der Haas (SdH) oscillations.

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