Undoped Strained Ge Quantum Well with Ultrahigh Mobility of Two Million
Zhenzhen Kong,Zonghu Li,Gang Cao,Jiale Su,Yiwen Zhang,Jinbiao Liu,Jingxiong Liu,Yuhui Ren,Huihui Li,Laiming Wei,Yuanyuan Wu,Junfeng Li,Zhenhua Wu,Jiecheng Yang,Chao Zhao,Tianchun Ye,Guilei Wang,Guo-Ping Guo,Henry H Radamson,Hai-Ou Li
DOI: https://doi.org/10.1021/acsami.3c03294
IF: 9.5
2023-05-12
ACS Applied Materials & Interfaces
Abstract:We develop a method to fabricate an undoped Ge quantum well (QW) under a 32 nm relaxed Si(0.2)Ge(0.8) shallow barrier. The bottom barrier contains Si(0.2)Ge(0.8) (650 °C) and Si(0.1)Ge(0.9) (800 °C) such that variation of Ge content forms a sharp interface that can suppress the threading dislocation density (TDD) penetrating into the undoped Ge quantum well. The SiGe barrier introduces enough in-plane parallel strain (ε(∥) strain -0.41%) in the Ge quantum well. The heterostructure field-effect...
materials science, multidisciplinary,nanoscience & nanotechnology