Room-temperature single-electron tunneling in highly-doped silicon-on-insulator nanoscale field-effect transistors

Taruna Teja Jupalli,Ananta Debnath,Gaurang Prabhudesai,Kensuke Yamaguchi,P. Jeevan Kumar,Daniel Moraru,Yukinori ONO
DOI: https://doi.org/10.35848/1882-0786/ac68cf
IF: 2.819
2022-04-20
Applied Physics Express
Abstract:Abstract From the viewpoint of high- (room-) temperature operation of donor-based single-electron transistors, we make a comparative study of nano-scale silicon-on-insulator transistors with phosphorus-doped channels for two dopant concentrations: N D ≈ 1.0×10 ^18 and 2.0×10 ^20 cm -3 . We experimentally show that the high-N D devices can provide room-temperature single-electron tunneling operation owing to a large tunnel-barrier height, while operation temperature is limited to about 100 K for the low-N D devices. Numerical simulations of random donor-atom distributions indicate that donor clustering plays a dominant role in the formation of quantum dots, and suggests that clusters comprising of more-than-three donors are responsible for room-temperature operation.
physics, applied
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