Structured films of light-emitting silicon nanoparticles produced by cluster beam deposition

Friedrich Huisken,Bernhard Kohn,Vincent Paillard
DOI: https://doi.org/10.1063/1.124176
IF: 4
1999-06-21
Applied Physics Letters
Abstract:Crystalline silicon nanoparticles (quantum dots) with diameters around 4 nm are produced via CO2-laser-induced decomposition of SiH4 in a flow reactor and subsequently transferred into a freely propagating cluster beam. Thin structured films are then obtained by shaping the beam with a mask and depositing the nanoclusters at low energy on a sapphire substrate. Upon illumination with ultraviolet radiation, the nanoparticles exhibit strong photoluminescence in the red.
physics, applied
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