Integration of Volume Change Liner Stressor on Ferroelectric Capacitors and FeFETs: Simulation and Electrical Characterization

Yaxuan Yuan,Xueyang Li,Xinze Li,Bing Chen,Dawei Gao,Genquan Han,Ran Cheng
DOI: https://doi.org/10.1109/icicdt63592.2024.10717760
2024-01-01
Abstract:In this work, volume change liner stressor $\text{Ge}_2 \text{Sb}_2 \text{Te}_5$ (GST) and ZnS: $\text{SiO}_{2}$ were experimentally integrated with the ferroelectric (FE) capacitors for the first time. Strained $\mathbf{H f}_{0.5} \mathbf{Z r}_{0.5} \mathbf{O}_2$ (HZO) FE capacitors with various GST and ZnS:SiO2 liner thickness were fabricated to study the impact of strain on the polarization of FE devices. 14 % increases of remanent $P_{\mathrm{r}}$ . and saturation polarization Ps can be obtained in the FE capacitors with the GST stressor. In contrast, 4.9% and 2.7% reduction of $P_{\mathrm{r}}$ and $P_{\mathrm{s}}$ can be obtained in the FE capacitors with the ZnS: $\text{SiO}_{2}$ stressor. Calibrated TCAD simulation models for the n-FeFET and p-FeFET with strained HZO dielectric were constructed to study the effect of different levels of experimentally induced strain on the performance of the scaled HZO FeFETs, respectively.
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