Abstract:On-chip electron sources with high electron-emitting performance and small footprint are of great interest in vacuum nanoelectronics. Resembling traditional thermionic emission sources based on a hot tungsten filament, Joule-heated carbon nanotube can function as filament material of nanoscale electron source because of its excellent thermal stability and electrical conductivity. Here, we demonstrate the fabrication of high-performance on-chip thermionic electron micro-emitter arrays by utilizing microfabrication technologies and exploiting suspended carbon nanotube arrays as thermionic filaments.1 For single micro-emitter, an electron emission density up to <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\approx 1.33$</tex> A <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{cm}^{-2}$</tex> is obtained at a low-driven voltage <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\approx 4\mathrm{V})$</tex> . The turn-on/off time is measured to be less than <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1\ \mu \mathrm{s}$</tex> , because thermal inertia of filament is greatly reduced compared with their bulky counterparts. Particularly, stable <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\pm 1.2\%$</tex> ) emission current fluctuation for 30 min) and reproducible <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\pm 0.2\%$</tex> driven voltage variation over 27 cycles) electron emission have been experimentally observed under a low vacuum of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\approx 5\times 10^{-4}$</tex> Pa. Even under a rough vacuum of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\approx 10^{-1}$</tex> Pa, an impressive reproducibility ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\pm 2\%$</tex> driven voltage variation over 20 cycles) is obtained. Moreover, emission performances of micro-emitter arrays are found to exhibit good uniformity in wafer scale. The outstanding stability, reproducibility and uniformity of our carbon nanotube based thermionic electron micro-emitter imply their promising applications as on-chip integrated electron sources.

An On-Chip Vacuum Triode Based on Thermionic Electron Emission from Super-Aligned Carbon Nanotube Films

A Vacuum Transistor Based on Field-Assisted Thermionic Emission from a Multiwalled Carbon Nanotube

An On-chip Vacuum Transistor Based on a Multiwalled Carbon Nanotube*

On-Chip Thermionic Electron Micro-Emitter Arrays Based on Carbon Nanotube Films

Field-emission triodes with integrated anodes

High‐Performance On‐Chip Thermionic Electron Micro‐Emitter Arrays Based on Super‐Aligned Carbon Nanotube Films

On-Chip Thermionic Electron Sources Based on Graphene and Carbon Nanotubes

On-Chip Thermionic Electron Emitter Based on Single-Walled Carbon Nanotube

Thermionic electron emission from single carbon nanostructures and its applications in vacuum nanoelectronics

On-Chip Thermionic Electron Emitter Arrays Based on Horizontally Aligned Single-Walled Carbon Nanotubes

Field Emission Vacuum Power Switch Using Vertically Aligned Carbon Nanotubes

Wafer-Scale Fabricated On-Chip Thermionic Electron Sources With an Integrated Extraction Gate

Fabrication of A Nanoelectromechanical Switch Using A Suspended Carbon Nanotube

Hot electron field emission via individually transistor-ballasted carbon nanotube arrays.

RF modulation of a 3 mA beam current from a carbon nanotube cathode

Carbon Nanotube Technology For Solid State And Vacuum Electronics

Nanoelectromechanical Switch with Low Voltage Drive

Wafer-scale Fabricated On-Chip Thermionic Electron Sources Based on a Suspended Y2O3/TiN Filament

Carbon nanotube film gate in vacuum electronic devices.

Carbon Nanotube Lateral Field Emission Device with Embedded Field Effect Transistor

A Nanoscale Vacuum Transistor Based on Vertical Silicon Dioxide Tunneling Junctions