Abstract:An on-chip vacuum triode based on thermionic electron emission from suspended super-aligned carbon nanotube films is realized via microfabrication technology. The device employs a multilayer-stacked structure with an in-built vacuum cavity that separates the thermionic electron source and the collector electrode. The wafer-scale fabricated thermionic electron source exhibits an emission current of up to 200 mu A with an emission density of 6.7 A cm-2. To switch the emission current from the electron source to the collector electrode, the heavily doped silicon substrate underneath suspended carbon nanotubes works as the gate electrode, achieving an on/off current ratio of 102 and a subthreshold slope of similar to 7 V dec-1. Additionally, the vacuum triode exhibits good tolerance to harsh environments of high or low temperature and X-ray radiation. All these properties make the miniaturized vacuum triode a device with potential for application in harsh environments. An on-chip vacuum triode based on thermionic electron emission from suspended super-aligned carbon nanotube films is realized via microfabrication technology.

Field Emission Vacuum Power Switch Using Vertically Aligned Carbon Nanotubes

Field Emission From Short And Stubby Vertically Aligned Carbon Nanotubes

Carbon Nanotube Technology For Solid State And Vacuum Electronics

Lateral Field Emitters Fabricated Using Carbon Nanotubes

Nanoelectromechanical Switches with Vertically Aligned Carbon Nanotubes

Carbon Nanotubes As Field Emission Sources

Carbon Nanotubes And Their Potential Field Emission Applications

Plasma Enhanced Chemical Vapour Deposited Carbon Nanotubes for Field Emission Applications

Fabrication and electrical characteristics of carbon nanotube field emission microcathodes with an integrated gate electrode

Growth of Aligned Multiwall Carbon Nanotubes and the Effect of Adsorbates on the Field Emission Properties

Aligned Carbon Nanotubes/Fibers for Applications in Vacuum Microwave Amplifiers

Fabrication of A Nanoelectromechanical Switch Using A Suspended Carbon Nanotube

Nanoelectromechanical Switch with Low Voltage Drive

Design and Characteristics of a Vertical Carbon Nanotube Sheet Field Emitter

Carbon nanotube film gate in vacuum electronic devices.

Fabrication of Carbon Nanotube Lateral Field Emitters

An On-Chip Vacuum Triode Based on Thermionic Electron Emission from Super-Aligned Carbon Nanotube Films

Carbon Nanotube Lateral Field Emission Device with Embedded Field Effect Transistor

Carbon Nanotube Displays

Hot electron field emission via individually transistor-ballasted carbon nanotube arrays.

Vertically Aligned Carbon Nanotube Microbundle Arrays for Field-Emission Applications