On-Chip Thermionic Electron Micro-Emitter Arrays Based on Carbon Nanotube Films

Yuwei Wang,Xianlong Wei
DOI: https://doi.org/10.1109/icops37625.2020.9717549
2020-01-01
Abstract:On-chip electron sources with high electron-emitting performance and small footprint are of great interest in vacuum nanoelectronics. Resembling traditional thermionic emission sources based on a hot tungsten filament, Joule-heated carbon nanotube can function as filament material of nanoscale electron source because of its excellent thermal stability and electrical conductivity. Here, we demonstrate the fabrication of high-performance on-chip thermionic electron micro-emitter arrays by utilizing microfabrication technologies and exploiting suspended carbon nanotube arrays as thermionic filaments.1 For single micro-emitter, an electron emission density up to <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\approx 1.33$</tex> A <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{cm}^{-2}$</tex> is obtained at a low-driven voltage <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\approx 4\mathrm{V})$</tex> . The turn-on/off time is measured to be less than <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1\ \mu \mathrm{s}$</tex> , because thermal inertia of filament is greatly reduced compared with their bulky counterparts. Particularly, stable <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\pm 1.2\%$</tex> ) emission current fluctuation for 30 min) and reproducible <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\pm 0.2\%$</tex> driven voltage variation over 27 cycles) electron emission have been experimentally observed under a low vacuum of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\approx 5\times 10^{-4}$</tex> Pa. Even under a rough vacuum of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\approx 10^{-1}$</tex> Pa, an impressive reproducibility ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\pm 2\%$</tex> driven voltage variation over 20 cycles) is obtained. Moreover, emission performances of micro-emitter arrays are found to exhibit good uniformity in wafer scale. The outstanding stability, reproducibility and uniformity of our carbon nanotube based thermionic electron micro-emitter imply their promising applications as on-chip integrated electron sources.
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