On-Chip Thermionic Electron Emitter Arrays Based on Horizontally Aligned Single-Walled Carbon Nanotubes

Yuwei Wang,Li Fang,Li Xiang,Gongtao Wu,Yi Zeng,Qing Chen,Xianlong Wei
DOI: https://doi.org/10.1109/ted.2018.2887227
IF: 3.1
2019-01-01
IEEE Transactions on Electron Devices
Abstract:Thermionic electron emitter, a critical component in vacuum electronic devices, usually suffers from bulky size, difficulty to integrate, and slow temporal response. Here, to overcome these problems, we fabricate and test a new miniature electron emitter: on-chip thermionic electron emitter arrays based on horizontally aligned single-walled carbon nanotubes. The devices are fabricated and integrated on a Si chip with microfabrication technologies, providing compactness as well as fast temporal response. Emitter arrays with a packing density of up to similar to 0.4 x 10(7) emitters/cm(2) and an emission density of 1.73 mA/cm(2) at a bias voltage of 2.64 V are realized. The turn-on/off response times of the devices are measured to be similar to 150/500 ns, which are 5 orders of magnitude faster than those of their bulky counterparts. The advantages of on-chip nature, high degree of integration, and fast temporal response make the thermionic emitter arrays promising in miniature vacuum electronic devices.
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