Abstract:On-chip electron sources with high electron-emitting performance and small footprint are of great interest in vacuum nanoelectronics. Resembling traditional thermionic emission sources based on a hot tungsten filament, Joule-heated carbon nanotube can function as filament material of nanoscale electron source because of its excellent thermal stability and electrical conductivity. Here, we demonstrate the fabrication of high-performance on-chip thermionic electron micro-emitter arrays by utilizing microfabrication technologies and exploiting suspended carbon nanotube arrays as thermionic filaments.1 For single micro-emitter, an electron emission density up to <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\approx 1.33$</tex> A <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{cm}^{-2}$</tex> is obtained at a low-driven voltage <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\approx 4\mathrm{V})$</tex> . The turn-on/off time is measured to be less than <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1\ \mu \mathrm{s}$</tex> , because thermal inertia of filament is greatly reduced compared with their bulky counterparts. Particularly, stable <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\pm 1.2\%$</tex> ) emission current fluctuation for 30 min) and reproducible <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\pm 0.2\%$</tex> driven voltage variation over 27 cycles) electron emission have been experimentally observed under a low vacuum of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\approx 5\times 10^{-4}$</tex> Pa. Even under a rough vacuum of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\approx 10^{-1}$</tex> Pa, an impressive reproducibility ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\pm 2\%$</tex> driven voltage variation over 20 cycles) is obtained. Moreover, emission performances of micro-emitter arrays are found to exhibit good uniformity in wafer scale. The outstanding stability, reproducibility and uniformity of our carbon nanotube based thermionic electron micro-emitter imply their promising applications as on-chip integrated electron sources.

An On-chip Vacuum Transistor Based on a Multiwalled Carbon Nanotube*

A Vacuum Transistor Based on Field-Assisted Thermionic Emission from a Multiwalled Carbon Nanotube

An On-Chip Vacuum Triode Based on Thermionic Electron Emission from Super-Aligned Carbon Nanotube Films

A Nanoscale Vacuum Transistor Based on Vertical Silicon Dioxide Tunneling Junctions

Monolithic Three‐dimensional Integration of Aligned Carbon Nanotube Transistors for High‐performance Integrated Circuits

Carbon Nanotube Technology For Solid State And Vacuum Electronics

A Vacuum Transistor Based on Electron Emission From SiOx Tunneling Diodes

Nanoscale Vacuum Channel Transistor

Thermionic electron emission from single carbon nanostructures and its applications in vacuum nanoelectronics

Nanoscale vacuum channel transistors fabricated on silicon carbide wafers

A Vacuum Transistor Based on Electron Emission From SiO<inline-formula> <tex-math notation="LaTeX">$_{\textit{x}}$</tex-math> </inline-formula> Tunneling Diodes

A Vacuum Transistor Based on Electron Emission From SiO<inline-formula> <tex-math notation="LaTeX">$_{\textit{x}}$</tex-math> </inline-formula> Tunneling Diodes

On-Chip Thermionic Electron Micro-Emitter Arrays Based on Carbon Nanotube Films

A Graphene‐Based Vacuum Transistor with a High ON/OFF Current Ratio

On-Chip Thermionic Electron Sources Based on Graphene and Carbon Nanotubes

On-Chip Thermionic Electron Emitter Based on Single-Walled Carbon Nanotube

Progress on a Carbon Nanotube Field-Effect Transistor Integrated Circuit: State of the Art, Challenges, and Evolution

Carbon Nanotube Lateral Field Emission Device with Embedded Field Effect Transistor

Field Emission Vacuum Power Switch Using Vertically Aligned Carbon Nanotubes

A vacuum sensor using field emitters made by multiwalled carbon nanotube yarns

High‐Performance On‐Chip Thermionic Electron Micro‐Emitter Arrays Based on Super‐Aligned Carbon Nanotube Films

An On-chip Vacuum Transistor Based on a Multiwalled Carbon Nanotube*

A Vacuum Transistor Based on Field-Assisted Thermionic Emission from a Multiwalled Carbon Nanotube

An On-Chip Vacuum Triode Based on Thermionic Electron Emission from Super-Aligned Carbon Nanotube Films

A Nanoscale Vacuum Transistor Based on Vertical Silicon Dioxide Tunneling Junctions

Monolithic Three‐dimensional Integration of Aligned Carbon Nanotube Transistors for High‐performance Integrated Circuits

Carbon Nanotube Technology For Solid State And Vacuum Electronics

A Vacuum Transistor Based on Electron Emission From SiOx Tunneling Diodes

Nanoscale Vacuum Channel Transistor

Thermionic electron emission from single carbon nanostructures and its applications in vacuum nanoelectronics

Nanoscale vacuum channel transistors fabricated on silicon carbide wafers

A Vacuum Transistor Based on Electron Emission From SiO&lt;inline-formula&gt; &lt;tex-math notation=&quot;LaTeX&quot;&gt;$_{\textit{x}}$&lt;/tex-math&gt; &lt;/inline-formula&gt; Tunneling Diodes

A Vacuum Transistor Based on Electron Emission From SiO<inline-formula> <tex-math notation="LaTeX">$_{\textit{x}}$</tex-math> </inline-formula> Tunneling Diodes

On-Chip Thermionic Electron Micro-Emitter Arrays Based on Carbon Nanotube Films

A Graphene‐Based Vacuum Transistor with a High ON/OFF Current Ratio

On-Chip Thermionic Electron Sources Based on Graphene and Carbon Nanotubes

On-Chip Thermionic Electron Emitter Based on Single-Walled Carbon Nanotube

Progress on a Carbon Nanotube Field-Effect Transistor Integrated Circuit: State of the Art, Challenges, and Evolution

Carbon Nanotube Lateral Field Emission Device with Embedded Field Effect Transistor

Field Emission Vacuum Power Switch Using Vertically Aligned Carbon Nanotubes

A vacuum sensor using field emitters made by multiwalled carbon nanotube yarns

High‐Performance On‐Chip Thermionic Electron Micro‐Emitter Arrays Based on Super‐Aligned Carbon Nanotube Films

A Vacuum Transistor Based on Electron Emission From SiO<inline-formula> <tex-math notation="LaTeX">$_{\textit{x}}$</tex-math> </inline-formula> Tunneling Diodes