A Vacuum Transistor Based on Electron Emission From SiO<inline-formula> <tex-math notation="LaTeX">$_{\textit{x}}$</tex-math> </inline-formula> Tunneling Diodes

Yidan He,Hanyang Zang,Jun Yao,Zhiwei Li,Gengmin Zhang,Xianlong Wei
DOI: https://doi.org/10.1109/TED.2024.3381575
IF: 3.1
2024-01-01
IEEE Transactions on Electron Devices
Abstract:An ON-chip vacuum transistor based on electron emission from SiO <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$_{\textit{x}}$</tex-math> </inline-formula> tunneling diodes formed at the side surface of a thin SiO <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$_{\text{2}}$</tex-math> </inline-formula> film is proposed, where electrons transport in the vacuum channel between the electron emitter and collector electrode is modulated by an underneath gate electrode. The device performances are studied by the finite element simulation method. An on/off current ratio up to <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$10^{5}$</tex-math> </inline-formula> and a subthreshold slope of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim$</tex-math> </inline-formula> 500 mV/dec are obtained by simulation. Experimentally, a vacuum transistor based on SiO <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$_{\textit{x}}$</tex-math> </inline-formula> tunneling diodes in a surrounding structure is fabricated, achieving an on/off current ratio of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$10^{4}$</tex-math> </inline-formula> and a subthreshold slope of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim$</tex-math> </inline-formula> 5 V/dec. The performance degradation in experiments is mainly attributed to unoptimized device structures.
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