A Nanoscale Vacuum Transistor Based on Vertical Silicon Dioxide Tunneling Junctions

Yidan He,Zhiwei Li,Xianlong Wei
DOI: https://doi.org/10.1109/ivnc63480.2024.10652581
2024-01-01
Abstract:An on-chip vacuum transistor relying on electron emission from SiOx tunneling junctions formed at the side surface of a thin SiO2 film is proposed, where electron transport in a vacuum channel between the electron emitter and collector electrode is modulated by an underneath gate electrode. The proposed vacuum transistor achieves an ON/OFF current ratio of 10(4) and a subthreshold slope of similar to 5 V/dec.
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