A High Heat Transfer Efficiency MEMS Thermal Conductivity Gas Sensor with Bridge Structure for Hydrogen Detection

Dongcheng Xie,Yan Zhang,Di He,Yujie Yang,Ruichen Liu,Chong Xing,Dongliang Chen,Liang Geng,Qiuju Wu,Dongting Yao,Lei Xu
DOI: https://doi.org/10.1109/mems58180.2024.10439440
2024-01-01
Abstract:This paper reports a low-cost MEMS gas sensor based on thermal conductivity principle that formed by three independent suspended bridges including a microheater and a pair of symmetrical temperature sensors. To enhance sensing ability of the temperature sensors to the heat source for sensitivity improving, the microheater adopts a curved design and are fully surrounded by the temperature sensors on both sides to increase the lateral heat conduction path. Meanwhile, the gaps between heater and temperature sensors are small enough to improve thermal response of the temperature sensors. The fabricated sensor realized high response to H 2 .
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