Design of Thermal Liquid Flow Microsensor

DUAN Xuan-yi,XIE Hai-bo,FU Xin,YANG Hua-yong
DOI: https://doi.org/10.3969/j.issn.1000-9787.2005.08.030
2005-01-01
Abstract:A new thermal liquid flow microsensor with a large dynamic range as well as good sensitivity to small flow which will adopt a combination of a calorimetric device and a hot-film device is design.Pt microfilaments are fabricated as the thermoresistive sensing elements which are sandwiched in two parylene layers by using MEMS process.The flow information is obtained by measuring the resistance difference of the Pt microfilaments in different temperature.Both the measuring principles and the micro fabrication process are demonstrated.The result of the flow temperature distribution simulations is also demonstrated and discussed,and the further optimization of the sensor is thrown light on.
What problem does this paper attempt to address?