Abstract:We review recent advances in experimental methods for high spatial-resolution and high time-resolution thermometry, and the application of these and related methods for measurements of thermal transport in low-dimensional structures. Scanning thermal microscopy (SThM) achieves lateral resolutions of 50 nm and a measurement bandwidth of 100 kHz; SThM has been used to characterize differences in energy dissipation in single-wall and multi-wall carbon nanotubes. Picosecond thermoreflectance enables ultrahigh time-resolution in thermal diffusion experiments and characterization of heat flow across interfaces between materials; the thermal conductance G of interfaces between dissimilar materials spans a relatively small range, 20 <G <200 MW m(-2) K-1 near room temperature. Scanning thermoreflectance microscopy provides nanosecond time resolution and submicron lateral resolution needed for studies of heat transfer in microelectronic, opto-electronic and micromechanical systems. A fully-micromachined solid immersion lens has been demonstrated and achieves thermal-radiation imaging with lateral resolution at far below the diffraction limit, <2 mum. Microfabricated metal bridges using electrical resistance thermometry and joule heating give precise data for thermal conductivity of single crystal films, multilayer thin films, epitaxial superlattices, polycrystalline films, and interlayer dielectrics. The room temperature thermal conductivity of single crystal films of Si is strongly reduced for layer thickness below 100 nm. The through-thickness thermal conductivity of Si-Ge and GaAs-AlAs superlattices has recently been shown to be smaller than the conductivity of the corresponding alloy. The 3omega method has been recently extended to measurements of anisotropic conduction in polyimide and superlattices. Data for carbon nanotubes measured using micromachined and suspended heaters and thermometers indicate a conductivity near room temperature greater than diamond.

Research On Thermal Conductivity Measurement Of Submicrometer-Scale Silicon Dioxide Film In Thermal Flow Sensor By Micro-Raman Technique

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

Raman Scattering Characterization of Transparent Thin Film for Thermal Conductivity Measurement

A Metrology Of Silicon Film Thermal Conductivity Using Micro-Raman Spectroscopy

Design of Thermal Liquid Flow Microsensor

Measurement of In-Plane Thermal Conductivity of Ultrathin Films Using Micro-Raman Spectroscopy

Thermal Conductivity Characterization of Ultra-Thin Silicon Film Using the Ultra-Fast Transient Hot Strip Method*

Fabrication of Flexible Thermal Thin-film Sensor Array

Quantum Dots Photoluminescence Based Thin Film Thermal Conductivity Metrology

Thermal Conductivity Mapping of Oxidized SiC/SiC Composites by Time‐domain Thermoreflectance with Heterodyne Detection

Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures

In-Plane Thermal Conductivity Of Ultra-Thin Al2o3 Films Measured By Micro-Raman

In Situ And Noncontact Measurement Of Silicon Membrane Thermal Conductivity

Silicon Thermal Flow Sensor Based On Ceramic Substrate

Measurement of temperature-dependent diffusion coefficients using a confocal Raman microscope with microfluidic chips considering laser-induced heating effect.

Research and Development of Silicon Thermal Flow Sensor

Anisotropic thermal diffusivity measurement of thin films: From a few to hundreds of microns

Thermal Conductivity Measurements of Ultra-Thin Single Crystal Silicon Films Using Improved Structure

Improvement of the 3$ω$ thermal conductivity measurement technique at nanoscale

Thermal Modeling of Low Power Micromachined Solid State Integrated Gas Sensor