Abstract:We review recent advances in experimental methods for high spatial-resolution and high time-resolution thermometry, and the application of these and related methods for measurements of thermal transport in low-dimensional structures. Scanning thermal microscopy (SThM) achieves lateral resolutions of 50 nm and a measurement bandwidth of 100 kHz; SThM has been used to characterize differences in energy dissipation in single-wall and multi-wall carbon nanotubes. Picosecond thermoreflectance enables ultrahigh time-resolution in thermal diffusion experiments and characterization of heat flow across interfaces between materials; the thermal conductance G of interfaces between dissimilar materials spans a relatively small range, 20 <G <200 MW m(-2) K-1 near room temperature. Scanning thermoreflectance microscopy provides nanosecond time resolution and submicron lateral resolution needed for studies of heat transfer in microelectronic, opto-electronic and micromechanical systems. A fully-micromachined solid immersion lens has been demonstrated and achieves thermal-radiation imaging with lateral resolution at far below the diffraction limit, <2 mum. Microfabricated metal bridges using electrical resistance thermometry and joule heating give precise data for thermal conductivity of single crystal films, multilayer thin films, epitaxial superlattices, polycrystalline films, and interlayer dielectrics. The room temperature thermal conductivity of single crystal films of Si is strongly reduced for layer thickness below 100 nm. The through-thickness thermal conductivity of Si-Ge and GaAs-AlAs superlattices has recently been shown to be smaller than the conductivity of the corresponding alloy. The 3omega method has been recently extended to measurements of anisotropic conduction in polyimide and superlattices. Data for carbon nanotubes measured using micromachined and suspended heaters and thermometers indicate a conductivity near room temperature greater than diamond.

Determination of Thermal Conductivity of phase pure 10H-SiC Thin Films by non-destructive Raman Thermometry

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

Raman Scattering Characterization of Transparent Thin Film for Thermal Conductivity Measurement

Research On Thermal Conductivity Measurement Of Submicrometer-Scale Silicon Dioxide Film In Thermal Flow Sensor By Micro-Raman Technique

Thermal Conductivity Ofa-Si:H Thin Films

Measurement of In-Plane Thermal Conductivity of Ultrathin Films Using Micro-Raman Spectroscopy

Anomalously High Thermal Conductivity of Amorphous Silicon Films Prepared by Hot-Wire Chemical Vapor Deposition

Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures

Thermal Conductivity Mapping of Oxidized SiC/SiC Composites by Time‐domain Thermoreflectance with Heterodyne Detection

Spatially Resolved Determination of Thermal Conductivity by Raman Spectroscopy

In-Plane Thermal Conductivity Of Ultra-Thin Al2o3 Films Measured By Micro-Raman

Thermal Conductivity Characterization of Ultra-Thin Silicon Film Using the Ultra-Fast Transient Hot Strip Method*

Heat-Transport in Micron Thick A-Si-H Films

Anomalously High Thermal Conductivity of Amorphous Si Deposited by Hot-Wire Chemical Vapor Deposition

Thermal Conductivity of Thin Films: Measurements and Understanding

Thermal Conductivity of GaN, GaN71 , and SiC from 150 K to 850 K

Tunable Thermal Conductivity of Surface Phonon Polaritons in SiC Thin Film

Thermal Characterization Of Si3n4 Thin Films Using Transient Thermoreflectance Technique

Micro‐scale, In‐plane Thermal Conductivity of PEDOT:PSS Thin Films Measured by a Suspended Membrane Device

Accurate and wide-range measurement of thermal conductivity of semiconductor materials by laser-excited Raman spectroscopy