Raman Scattering Characterization of Transparent Thin Film for Thermal Conductivity Measurement

Shuo Huang,Xiaodong Ruan,Jun Zou,Xin Fu,Huayong Yang
DOI: https://doi.org/10.2514/1.40976
2012-01-01
Journal of Thermophysics and Heat Transfer
Abstract:The Raman scattering method is a noncontact and nondestructive method for film thermal conductivity measurement. However, the original Raman scattering method cannot calculate the thermal conductivity of thin transparent films with submicrometer- or nanometer-scale thickness. An analytical heat transfer model has been built to extend the original Raman scattering method to thin transparent films with submicrometer- or nanometer-scale thickness. Experiments were performed using the extended method to measure the thermal conductivity of silicon dioxide films with submicrometer-scale thickness. The interface thermal resistance between the silicon dioxide film and the silicon substrate was also obtained. The experimental results are consistent with reported data.
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