An Ultra Low Power Consumption Methane Gas Detector Based on an Optimized Suspended Membrane Microhotplate

Lei Xu,Tie Li,Rui Zheng,Lei Xie,Lichung Lee,Jiwei Jiao,Yuelin Wang

DOI: https://doi.org/10.1166/sl.2011.1600

2011-01-01

Sensor Letters

Abstract:In this paper a new developed methane gas detector based on microhotplates with ultra low power consumption is demonstrated. A suspended membrane microhotplate with platinum (Pt) heat element was designed and fabricated carefully by optimizing its structure. Four high length-to-width ratio beams decreased its power consumption successfully and the corner compensations improved its mechanical strength. Based on this microhotplate, a catalytic combustion type methane gas detector with Pd-Pt/gamma-Al2O3 catalyst was formed. Test results indicate that the microhotplate consumed only 9 mW when heated up to 400 degrees C. The methane gas detector achieved a sensitivity of 1.1 mV/% CH4 at a power of 30 mW.