Annealing effect on the methane sensing performance of Pt–SnO 2 /ZnO double layer sensor

Xun Li,Heng He,Tian Tan,Zhihan Zou,Zhanyou Tian,Wanling Zhou,Yuwen Bao,Xiaohong Xia,Yun Gao
DOI: https://doi.org/10.1016/j.apsusc.2023.158428
IF: 6.7
2023-09-12
Applied Surface Science
Abstract:Low power consumption is a new emerged requirement for methane sensors long-term working in a gas supervisory control system. Great challenges remain in development of heat free methane sensors based on metal oxide semiconductors (MOS). In this work, Pt-doped SnO 2 (Pt-SnO 2 ) grow on well aligned ZnO nanorod-array to form an inter-staggered double-layer structure on AZO glass by a two-step hydrothermal method, with the annealing temperature being systematically studied. The optimized processing parameters are 1 at% Pt doping content and 700 °C annealing temperature, offering the best sensing response of 3.36 to 800 ppm CH 4 at room temperature. SnO 2 /ZnO without Pt doping shows linear I-V relationship, while the Pt-SnO 2 /ZnO shows a Schottky-like I-V curve with the Schottky barrier height decreases as increasing the CH 4 concentration. The activation energy (Δ E a ) for CH 4 dissociation decreases with increasing the annealing temperature, and the Δ E a of the optimized Pt-SnO 2 /ZnO sample is only one-third of that in the SnO 2 /ZnO. In addition to the piezoelectric polarization electric field in ZnO, the build up Schottky-like barrier and the reduced activation energy via Pt doping and annealing are demonstrated to be efficient for enhancing the methane sensing performance at low operation temperature.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films
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