Design and Simulation of an Ultra-Low-Power Hydrogen Sulfide Gas Sensor with a Cantilever Structure

Xin Tian,Jifang Tao,Maosen Xu,Yuzhe Lin,Jia Zhao

DOI: https://doi.org/10.3390/mi15030295

IF: 3.4

2024-02-21

Micromachines

Abstract:Metal oxide gas sensors usually require a few tens of milliwatts of power consumption to operate at high temperature, which limits their application in mobile and portable devices. Here, we proposed a cantilever structure to build an ultra-low power gas sensor for hydrogen sulfide gas detection. By employing a nano-film size effect to reduce the thermal conductivity of the material, and self-heated corrugation configuration, the power consumption of the gas sensor is significantly reduced. Through numerical analysis and finite element simulation, two different gas sensors were designed and the power consumption and stress distribution were analyzed and optimized. Under the operating temperature of 200 °C, only 0.27 mW power is consumed, the stress value is less than 250 MPa and the displacement is a few hundred of nanometers. The results serve as a guide and reference for ultra-low power MEMS device designs.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied

What problem does this paper attempt to address?

This paper mainly discusses the design and simulation of ultra-low-power hydrogen gas sensors. Current metal oxide gas sensors require several milliwatts of power during high-temperature operation, which limits their application in mobile and portable devices. Researchers propose a novel gas sensor design with a cantilever structure to reduce the material's thermal conductivity through the size effect of nanofilm and significantly lower the power consumption through self-heating corrugation configuration.

Two different gas sensors were designed through numerical analysis and finite element simulation, and the power consumption and stress distribution were analyzed and optimized. At an operating temperature of 200°C, the sensor consumes only 0.27 milliwatts of power, with stress values below 250 megapascals and displacements in the hundreds of nanometers. These results provide guidance and reference for the design of ultra-low-power microelectromechanical systems (MEMS) devices.

The paper mentions that power consumption can be effectively reduced by reducing the size of microheaters, adopting corrugated structures, and decreasing thermal conductivity. The effect of material size on thermal conductivity is also discussed, indicating that the thermal conductivity of nanomaterials is usually lower than their macroscopic state, which is beneficial for reducing power consumption.

In summary, this paper aims to address the design of a hydrogen gas sensor that can significantly reduce power consumption while maintaining high detection performance to meet the requirements of portable devices. The goal of ultra-low-power is achieved through innovative cantilever structure and material selection.