Abstract:As the mainstream type of gas sensors, metal oxide semiconductor (MOS) gas sensors have garnered widespread attention due to their high sensitivity, fast response time, broad detection spectrum, long lifetime, low cost, and simple structure. However, the high power consumption due to the high operating temperature limits its application in some application scenarios such as mobile and wearable devices. At the same time, highly sensitive and low-power gas sensors are becoming more necessary and indispensable in response to the growth of the environmental problems and development of miniaturized sensing technologies. In this work, hierarchical indium oxide (In2O3) sensing materials were designed and the pulse-driven microelectromechanical system (MEMS) gas sensors were also fabricated. The hierarchical In2O3 assembled with the mass of nanosheets possess abundant accessible active sites. In addition, compared with the traditional direct current (DC) heating mode, the pulse-driven MEMS sensor appears to have the higher sensitivity for the detection of low-concentrations of nitrogen dioxide (NO2). The limit of detection (LOD) is as low as 100 ppb. It is worth mentioning that the average power consumption of the sensor is as low as 0.075 mW which is one three-hundredth of that in the DC heating mode. The enhanced sensing performances are attributed to loose and porous structures and the reducing desorption of the target gas driven by pulse heating. The combination of morphology design and pulse-driven strategy makes the MEMS sensors highly attractive for portable equipment and wearable devices.

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A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure

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A Novel Low Power Hexagonal Gas Sensor Cell for Multi-Channel Gas Detection

A Self-Temperature-Modulated Quadrilateral Gas Sensor for Gas Identification

A Warped-Cantilever MEMS MOS Gas Sensor Array

A Single-Chip 4-Channel Quadrilateral MOx Gas Sensor with Different Sensing Materials for Food Discrimination

A highly integrated and low-power sno2 gas sensor cell for the detection of gas mixture

Design and Simulation of an Ultra-Low-Power Hydrogen Sulfide Gas Sensor with a Cantilever Structure

Monolithic Integrated Cmos-Mems Mos Type Gas Sensor And Novel Heater For Sensitivity And Power Consumption Enhancement

Development of new co-planar platform configuration of MOX gas sensor

Low Concentration CO Gas Sensor Based on Pulsed-Heating and Wafer-Level Fabricated MEMS Hotplate

Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors

Pulse-Driven MEMS NO2 Sensors Based on Hierarchical In2O3 Nanostructures for Sensitive and Ultra-Low Power Detection

Low Power Consumption Gas Sensor Created from Silicon Nanowires/TiO2 Core-Shell Heterojunctions

Temperature-modulated UV-Enhanced SnO2 Gas Sensor Cell with High-Stability and High-Selectivity Gas Discrimination

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Trace Gas Sensor Based on Mems Cantilever Resonator