A Single-Chip 4-Channel Quadrilateral MOx Gas Sensor with Different Sensing Materials for Food Discrimination

Ruichen Liu,Ruoyu Zhang,Dongcheng Xie,Chong Xing,Yujie Yang,Muhammad Mustafa,Lei Xu,Feng Wu
2023-01-01
Abstract:This paper proposes a single-chip 4-channel MEMS metal-oxide (MOx) quadrilateral gas sensor with gas discrimination ability. Four sensing channels with different sensing materials are positioned on four edges and share a common quadrilateral structured micro-heater, which can achieve low power and high integration. In2O3-Au, SnO2-Au, SnO2-Cu, and WO3-Au were sputtered as the sensing materials by shadow masks successively. The overall size of the sensor is 1.2×1.2 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and the average power of each channel is as low as 8.69 mW. Test results show that the sensor can discriminate six types of food-related gases. Furthermore, principal component analysis (PCA) and support vector machine (SVM) classifiers were applied to distinguishing spoiled beef, pork, and shrimp, and SVM attained an accuracy of 100%.
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