MEMS Based H2 Gas Sensors

P. Chen,I. Chen,J. Neuner

Abstract:INTRODUCTION Hydrogen is currently expected to join electricity and fossil fuels as a primary energy carrier in the 21 century. Significant R&D efforts are currently directed toward creating the basic building blocks of such an H2 economy: production, storage, transport and utilization. A common need of these building blocks is the ability to detect and quantify the amount of H2 gas present. This is required for health and safety reasons, as well as for monitoring H2 based processes, e.g. H2 fueled automobiles would require sensors to detect gas leaks, as well as to monitor and regulate the air/H2 mixture. An effective H2 detection and monitoring system requires a sensor element that functions in a variety of challenging environments. It needs to be selective to H2 in a range of atmospheres, including the O2-rich highhumidity environments found in fuel cells, as well as in O2 depleted atmospheres. Speed of detection is a critical requirement for rapid response to potentially hazardous leaks. Low power consumption is requisite for use in portable instrumentation and personnel monitoring devices. Ultimately, these must be achieved by an element that is safe and economical. This paper reports on progress in developing MEMS (Micro-Electro-Mechanical Systems) based H2 gas sensors. These sensors couple novel thin films as the active layer with a MEMS structure known as a MicroHotplate. This coupling has resulted in a H2 gas sensor that has several unique advantages in terms of speed, sensitivity, and amenability to manufacturing.

Materials Science,Environmental Science,Engineering