A Fully Integrated Gas Detection System With Programmable Heating Voltage and Digital Output Rate for Gas Sensor Array

Jing Wang,Wenxian Gu,Weijie Qi,Chunling Li,Dongliang Chen,George Adedokun,Lei Xu,Feng Wu

DOI: https://doi.org/10.1109/jsen.2020.3042624

IF: 4.3

2021-03-01

IEEE Sensors Journal

Abstract:In this paper, a gas detection system for $2times 2$ MEMS gas sensor array is proposed. It has multiple measurement channels, programmable heating voltage, programmable measurement time, 24-bit digital output with 8-bit accuracy, wide measurement range and high linearity. The chip is realized in SMIC 180 nm complementary metal oxide semiconductor technology with an area of 1.58 mm $times1.66$ mm. The result of the fixed resistance measurement shows that the linearity of the resistance ranges ( $200~Omega $ -200 $text{K}Omega $ , $200~Omega $ -500 $text{K}Omega $ , $200~Omega $ -1 $text{M}Omega $ , $200~Omega $ -2 $text{M}Omega $ , $200~Omega $ -5M $Omega $ , and $200~Omega $ -10M $Omega$ ) are all less than 1% at different measurement time intervals. At 1 s measurement time, the circuit has a wide detectable resistance range ( $200~Omega $ -10 $text{M}Omega$ ), and high linearity of 0.3047%. The experimental results combined with the resistive MEMS gas sensor array show that the circuit has a good detection effect in the gas concentration range (0 ppm-340 ppm), and can even detect the change of gas concentration at a low concentration of 0.1 ppm. Moreover, the system can detect different responses of the same sensor at different heating voltages.

engineering, electrical & electronic,instruments & instrumentation,physics, applied

What problem does this paper attempt to address?

This paper aims to address the demand for portable, low-cost, and low-power gas detection systems, particularly in applications such as automotive, medical, food health diagnostics, environmental monitoring, and indoor air quality control. Traditional gas detection systems (e.g., mass spectrometers, gas chromatographs, and Fourier transform infrared spectrometers) are bulky, expensive, and complex. To overcome these issues, the authors propose a fully integrated gas detection system designed for a 2×2 MEMS gas sensor array.

Key features include:
1. **Multi-channel RTF readout circuit**: Converts sensor resistance changes into frequency signals, which are then converted into 24-bit digital signals through a digital frequency measurement circuit.
2. **Programmable heating voltage**: Provides 16 heating voltage options ranging from 0.8V to 2.3V with a step size of 0.1V, which helps improve sensor selectivity.
3. **Programmable output data rate**: Supports six different measurement times (20ms, 50ms, 100ms, 200ms, 500ms, and 1s) to meet the data rate requirements of different application scenarios.
4. **Internal I2C interface**: Allows self-consistency based on PC configuration information.
5. **Integrated adjustable oscillator circuit**: Provides clock signals for the entire system, making it more independent.

Experimental results show that the system has good linearity (less than 1%), performs well in the range of 200Ω to 10MΩ, and can effectively identify gases over a wide range of alcohol concentrations from 0ppm to 340ppm, even detecting low concentration changes of 0.1ppm. Additionally, the system can detect different responses of the same sensor under different heating voltages, which provides the possibility of further extracting sensor features using pattern recognition methods to improve selectivity.