A Fully Integrated Gas Detection System With Programmable Heating Voltage and Digital Output Rate for Gas Sensor Array
Jing Wang,Wenxian Gu,Weijie Qi,Chunling Li,Dongliang Chen,George Adedokun,Lei Xu,Feng Wu
DOI: https://doi.org/10.1109/jsen.2020.3042624
IF: 4.3
2021-03-01
IEEE Sensors Journal
Abstract:In this paper, a gas detection system for $2times 2$ MEMS gas sensor array is proposed. It has multiple measurement channels, programmable heating voltage, programmable measurement time, 24-bit digital output with 8-bit accuracy, wide measurement range and high linearity. The chip is realized in SMIC 180 nm complementary metal oxide semiconductor technology with an area of 1.58 mm $times1.66$ mm. The result of the fixed resistance measurement shows that the linearity of the resistance ranges ( $200~Omega $ -200 $text{K}Omega $ , $200~Omega $ -500 $text{K}Omega $ , $200~Omega $ -1 $text{M}Omega $ , $200~Omega $ -2 $text{M}Omega $ , $200~Omega $ -5M $Omega $ , and $200~Omega $ -10M $Omega$ ) are all less than 1% at different measurement time intervals. At 1 s measurement time, the circuit has a wide detectable resistance range ( $200~Omega $ -10 $text{M}Omega$ ), and high linearity of 0.3047%. The experimental results combined with the resistive MEMS gas sensor array show that the circuit has a good detection effect in the gas concentration range (0 ppm-340 ppm), and can even detect the change of gas concentration at a low concentration of 0.1 ppm. Moreover, the system can detect different responses of the same sensor at different heating voltages.
engineering, electrical & electronic,instruments & instrumentation,physics, applied