Abstract:During the last few decades, the microelectronics industry has actively been investigating the potential for the functional integration of semiconductor-based devices beyond digital logic and memory, which includes RF and analog circuits, biochips, and sensors, on the same chip. In the case of gas sensor integration, it is necessary that future devices can be manufactured using a fabrication technology which is also compatible with the processes applied to digital logic transistors. This will likely involve adopting the mature complementary metal oxide semiconductor (CMOS) fabrication technique or a technique which is compatible with CMOS due to the inherent low costs, scalability, and potential for mass production that this technology provides. While chemiresistive semiconductor metal oxide (SMO) gas sensors have been the principal semiconductor-based gas sensor technology investigated in the past, resulting in their eventual commercialization, they need high-temperature operation to provide sufficient energies for the surface chemical reactions essential for the molecular detection of gases in the ambient. Therefore, the integration of a microheater in a MEMS structure is a requirement, which can be quite complex. This is, therefore, undesirable and room temperature, or at least near-room temperature, solutions are readily being investigated and sought after. Room-temperature SMO operation has been achieved using UV illumination, but this further complicates CMOS integration. Recent studies suggest that two-dimensional (2D) materials may offer a solution to this problem since they have a high likelihood for integration with sophisticated CMOS fabrication while also providing a high sensitivity towards a plethora of gases of interest, even at room temperature. This review discusses many types of promising 2D materials which show high potential for integration as channel materials for digital logic field effect transistors (FETs) as well as chemiresistive and FET-based sensing films, due to the presence of a sufficiently wide band gap. This excludes graphene from this review, while recent achievements in gas sensing with graphene oxide, reduced graphene oxide, transition metal dichalcogenides (TMDs), phosphorene, and MXenes are examined.

Resistive gas sensor with integrated MOSFET micro hot-plate based on an analogue SOI CMOS process

A low power catalytic combustion gas sensor based on a suspended membrane microhotplate.

Monolithic Integrated Cmos-Mems Mos Type Gas Sensor And Novel Heater For Sensitivity And Power Consumption Enhancement

Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

GAS SENSING CMOS TRANSISTORS BASED ON SOI SUBSTRATE

From Ceramic Tube to Microcantilever: A New Strategy for Low Power, Fast Heating and High Integrated Metal Oxide Semiconductor Gas Sensor

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Monolithic Integrated CMOS-MEMS Fluorescence Quenching Gas Sensor and Resistive Temperature Detector (RTD) for Temperature Compensation

Thermal Modeling of Low Power Micromachined Solid State Integrated Gas Sensor

On‐Chip Annealing Using Embedded Micro‐Heater for Highly Sensitive and Selective Gas Detection

Low Concentration CO Gas Sensor Based on Pulsed-Heating and Wafer-Level Fabricated MEMS Hotplate

Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor

A Low Power Cantilever-Based Metal Oxide Semiconductor Gas Sensor

Non-Silicon MEMS Calorimetric Gas Flow Sensor

Design and Implementation of Multi-Layer Opened-IDAs Electrodes for the Response Enhancement of CMOS-MEMS Gas Sensors at Room Temperature

Application of Two-Dimensional Materials towards CMOS-Integrated Gas Sensors

Fast-Response, Sensitivitive and Low-Powered Chemosensors by Fusing Nanostructured Porous Thin Film and IDEs-Microheater Chip

CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors

Reliability of FET-type gas sensor with asymmetric air-gap micro-heater structure considering thermoelectric effect

Thermal Analysis and Design of A Micro-Hotplate for Sisubstrated Micro-Structural Gas Sensor

Monolithic Integration Of Gas/Humidity/Temperature Sensors With Thermal Coupling Effect Reduction