Abstract:This study demonstrates a vertically integrated environment sensor with a fluorescence quenching based gas sensor [1] and a resistive temperature detector (RTD) using the TSMC standard CMOS process (Fig. 1a). Features of this study are (Fig. 1): (1) integration of photo-sensors, thermal-isolation structure, temperature, and optical based gas-sensing films using CMOS and polymer dispensing technologies, (2) multiple optical sensors equipped with thermal compensation unit (thermometer) are monolithically integrated, (3) heterogeneous integration with LED can reduce the size of gas sensor, (4) various sensing films can be prepared for multiple gases detection. Measurements show the results of sensitivity at room temperature and under influence of temperature variation. A sensitivity of 19.7 (μA/%) for O 2 (sensing range: 16-50% oxygen concentration) is achieved at room temperature and the sensitivity of the gas sensor decreases from 9.2μA/% to 1.7μA/% as the environment temperature increases from ~40°C to ~80°C. The monolithically integrated thermometer enables the on-site temperature monitoring for sensing signal compensation.

Monolithic Integration Of Gas/Humidity/Temperature Sensors With Thermal Coupling Effect Reduction

An All-Digital CMOS Temperature Sensor with a Wide Supply Voltage Range.

Monolithic Integration of Humidity/Flow/Temperature Sensors As Environment Sensing Hub for Apparent-Temperature Detection

Fabrication and Integration of Soc Environment Sensing Hub with Gas/Pressure/Temperature Sensors

A CMOS Temperature Sensor with Versatile Readout Scheme and High Accuracy for Multi-Sensor Systems

Monolithic Integrated CMOS-MEMS Fluorescence Quenching Gas Sensor and Resistive Temperature Detector (RTD) for Temperature Compensation

Monolithically and Vertically Integrated Environmental Sensing Hub with Novel Air-Based Humidity Sensor Design

Monolithic Integration of Pressure/Humidity/Temperature Sensors for CMOS-Mems Environmental Sensing Hub with Structure Designs for Performances Enhancement

Monolithic Integrated Cmos-Mems Mos Type Gas Sensor And Novel Heater For Sensitivity And Power Consumption Enhancement

VERTICAL INTEGRATION OF PRESSURE/HUMIDITY/TEMPERATURE SENSORS FOR CMOS-MEMS ENVIRONMENTAL SENSING HUB

Crosstalk-free Hybrid Integrated Multimodal Sensor for Human Temperature, Humidity, and Pressure Monitoring

Implementation of a monolithic soc environmental sensing hub using cmos-mems technique

ENVIRONMENTAL SENSING HUB ON SINGLE CHIP USING DOUBLE-SIDE POST-CMOS PROCESSES

Vertically Integrated Cmos-Mems Capacitive Humidity Sensor And A Resistive Temperature Detector For Environment Application

Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

Integration of infrared sensor and pressure/humidity/temperature cmos-mems environmental sensing hub by local vacuum packaging

A 1770- $\mu$ M 2 Leakage-Based Digital Temperature Sensor with Supply Sensitivity Suppression in 55-Nm CMOS

Monolithic Integration of a Flexible Micro Thermal Flow Sensor

Monolithically Integrated Bidirectional Flow Sensor and Stacked Temperature/Humidity Sensor Based on CMOS-Compatible MEMS Technology

Capacitive CMOS Humidity Sensor with Novel Fringe Electrodes and Polyimide-Pillars for Performance Enhancement

Optical Temperature Sensor Based on Polysilicon Waveguides