Abstract:A fully-integrated complementary metal-oxide semiconductor (CMOS) sensor for combined temperature and humidity measurements is presented. The main purpose of the device is to monitor the hermeticity of micro-packages for implanted integrated circuits and to ensure their safe operation by monitoring the operating temperature and humidity on-chip. The smart sensor has two modes of operation, in which either the temperature or humidity is converted into a digital code representing a frequency ratio between two oscillators. This ratio is determined by the ratios of the timing capacitances and bias currents in both oscillators. The reference oscillator is biased by a current whose temperature dependency is complementary to the proportional to absolute temperature (PTAT) current. For the temperature measurement, this results in an exceptional normalized sensitivity of about 0.77%/°C at the accepted expense of reduced linearity. The humidity sensor is a capacitor, whose value varies linearly with relative humidity (RH) with a normalized sensitivity of 0.055%/% RH. For comparison, two versions of the humidity sensor with an area of either 0.2 mm2 or 1.2 mm2 were fabricated in a commercial 0.18 μm CMOS process. The on-chip readout electronics operate from a 5 V power supply and consume a current of approximately 85 µA.

Monolithic Integration of Humidity/Flow/Temperature Sensors As Environment Sensing Hub for Apparent-Temperature Detection

Monolithic Integration of Pressure/Humidity/Temperature Sensors for CMOS-Mems Environmental Sensing Hub with Structure Designs for Performances Enhancement

Monolithically and Vertically Integrated Environmental Sensing Hub with Novel Air-Based Humidity Sensor Design

An All-Digital CMOS Temperature Sensor with a Wide Supply Voltage Range.

VERTICAL INTEGRATION OF PRESSURE/HUMIDITY/TEMPERATURE SENSORS FOR CMOS-MEMS ENVIRONMENTAL SENSING HUB

Monolithic Integration Of Gas/Humidity/Temperature Sensors With Thermal Coupling Effect Reduction

Crosstalk-free Hybrid Integrated Multimodal Sensor for Human Temperature, Humidity, and Pressure Monitoring

Vertically Integrated Cmos-Mems Capacitive Humidity Sensor And A Resistive Temperature Detector For Environment Application

Fabrication and Integration of Soc Environment Sensing Hub with Gas/Pressure/Temperature Sensors

Implementation of a monolithic soc environmental sensing hub using cmos-mems technique

ENVIRONMENTAL SENSING HUB ON SINGLE CHIP USING DOUBLE-SIDE POST-CMOS PROCESSES

A CMOS Temperature Sensor with Versatile Readout Scheme and High Accuracy for Multi-Sensor Systems

Monolithically Integrated Bidirectional Flow Sensor and Stacked Temperature/Humidity Sensor Based on CMOS-Compatible MEMS Technology

Integration of infrared sensor and pressure/humidity/temperature cmos-mems environmental sensing hub by local vacuum packaging

Capacitive CMOS Humidity Sensor with Novel Fringe Electrodes and Polyimide-Pillars for Performance Enhancement

Monolithic Integrated CMOS-MEMS Fluorescence Quenching Gas Sensor and Resistive Temperature Detector (RTD) for Temperature Compensation

A CMOS Smart Temperature and Humidity Sensor with Combined Readout

A 1770- $\mu$ M 2 Leakage-Based Digital Temperature Sensor with Supply Sensitivity Suppression in 55-Nm CMOS

Design of Thermal Liquid Flow Microsensor

Wireless Sensing System-on-Chip for Near-Field Monitoring of Analog and Switch Quantities

Monolithic Integration of a Flexible Micro Thermal Flow Sensor